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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 6, Pages 44–47
DOI: https://doi.org/10.21883/PJTF.2021.06.50759.18536 (Mi pjtf4832) 		 
This article is cited in 3 scientific papers (total in 3 papers)

Smoothing of polycrystalline AlN thin films with argon cluster ions

I. V. Nikolaeva, N. G. Korobeishchikova, M. A. Roenkoa, P. V. Geydta, V. I. Struninb

a Novosibirsk State University
b Omsk State University
Full-text PDF (1565 kB) Citations (3)
DOI: https://doi.org/10.21883/PJTF.2021.06.50759.18536
Abstract: The possibility of surface modification of thin polycrystalline aluminum nitride films by bombardment with argon cluster ion beam is investigated. The processing was carried out with high- (105 eV/atom) and low-energy (10 eV/atom) cluster ions. Using the spectral function of roughness, a highly efficient smoothing of the surface of nanostructured thin films of aluminum nitride was demonstrated in a wide range of spatial frequencies ($\nu$ = 0.02–128 $\mu$m$^{-1}$) and at small etching depth ($<$ 100 nm).
Keywords: cluster ion beam, thin films, aluminum nitride, surface smoothing.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation FSUS-2020-0039
FSUS-2020-0029
075-03-2020-614
This study was supported by the Ministry of Science and Higher Education of the Russian Federation (grants nos. FSUS-2020-0039 and FSUS-2020-0029) and performed within the framework of a state assignment to the Omsk Scientific Center of the Siberian Branch of the Russian Academy of Sciences (no. 075-03-2020-614).
Received: 01.09.2020
Revised: 28.09.2020
Accepted: 11.12.2020
English version:
Technical Physics Letters, 2021, Volume 47, Issue 4, Pages 301–304
DOI: https://doi.org/10.1134/S1063785021030275
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: I. V. Nikolaev, N. G. Korobeishchikov, M. A. Roenko, P. V. Geydt, V. I. Strunin, “Smoothing of polycrystalline AlN thin films with argon cluster ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:6 (2021), 44–47; Tech. Phys. Lett., 47:4 (2021), 301–304
Citation in format AMSBIB
\Bibitem{NikKorRoe21}
\by I.~V.~Nikolaev, N.~G.~Korobeishchikov, M.~A.~Roenko, P.~V.~Geydt, V.~I.~Strunin
\paper Smoothing of polycrystalline AlN thin films with argon cluster ions
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 47
\issue 6
\pages 44--47
\mathnet{http://mi.mathnet.ru/pjtf4832}
\crossref{https://doi.org/10.21883/PJTF.2021.06.50759.18536}
\elib{https://elibrary.ru/item.asp?id=46301752}
\transl
\jour Tech. Phys. Lett.
\yr 2021
\vol 47
\issue 4
\pages 301--304
\crossref{https://doi.org/10.1134/S1063785021030275}
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    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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