Pisma v Zhurnal Tekhnicheskoi Fiziki
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Guidelines for authors

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Pisma v Zhurnal Tekhnicheskoi Fiziki:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 6, Pages 44–47
DOI: https://doi.org/10.21883/PJTF.2021.06.50759.18536 (Mi pjtf4832) 		 
This article is cited in 3 scientific papers (total in 3 papers)

Smoothing of polycrystalline AlN thin films with argon cluster ions

I. V. Nikolaeva, N. G. Korobeishchikova, M. A. Roenkoa, P. V. Geydta, V. I. Struninb

a Novosibirsk State University
b Omsk State University
Full-text PDF (1565 kB) Citations (3)
DOI: https://doi.org/10.21883/PJTF.2021.06.50759.18536
Abstract: The possibility of surface modification of thin polycrystalline aluminum nitride films by bombardment with argon cluster ion beam is investigated. The processing was carried out with high- (105 eV/atom) and low-energy (10 eV/atom) cluster ions. Using the spectral function of roughness, a highly efficient smoothing of the surface of nanostructured thin films of aluminum nitride was demonstrated in a wide range of spatial frequencies ($\nu$ = 0.02–128 $\mu$m$^{-1}$) and at small etching depth ($<$ 100 nm).
Keywords: cluster ion beam, thin films, aluminum nitride, surface smoothing.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation FSUS-2020-0039
FSUS-2020-0029
075-03-2020-614
This study was supported by the Ministry of Science and Higher Education of the Russian Federation (grants nos. FSUS-2020-0039 and FSUS-2020-0029) and performed within the framework of a state assignment to the Omsk Scientific Center of the Siberian Branch of the Russian Academy of Sciences (no. 075-03-2020-614).
Received: 01.09.2020
Revised: 28.09.2020
Accepted: 11.12.2020
English version:
Technical Physics Letters, 2021, Volume 47, Issue 4, Pages 301–304
DOI: https://doi.org/10.1134/S1063785021030275
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: I. V. Nikolaev, N. G. Korobeishchikov, M. A. Roenko, P. V. Geydt, V. I. Strunin, “Smoothing of polycrystalline AlN thin films with argon cluster ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:6 (2021), 44–47; Tech. Phys. Lett., 47:4 (2021), 301–304
Citation in format AMSBIB
\Bibitem{NikKorRoe21}
\by I.~V.~Nikolaev, N.~G.~Korobeishchikov, M.~A.~Roenko, P.~V.~Geydt, V.~I.~Strunin
\paper Smoothing of polycrystalline AlN thin films with argon cluster ions
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 47
\issue 6
\pages 44--47
\mathnet{http://mi.mathnet.ru/pjtf4832}
\crossref{https://doi.org/10.21883/PJTF.2021.06.50759.18536}
\elib{https://elibrary.ru/item.asp?id=46301752}
\transl
\jour Tech. Phys. Lett.
\yr 2021
\vol 47
\issue 4
\pages 301--304
\crossref{https://doi.org/10.1134/S1063785021030275}
Linking options:
  • https://www.mathnet.ru/eng/pjtf4832
  • https://www.mathnet.ru/eng/pjtf/v47/i6/p44
    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
    Statistics & downloads:
    Abstract page:66
    Full-text PDF :25
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2024