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This article is cited in 1 scientific paper (total in 1 paper)
Developing low-profile deflectometer for combined scanning probe and optical microscopy systems
A. V. Mezina, A. E. Efimovb, D. O. Solovyevaa, I. S. Vaskanac, V. A. Oleĭnikova, K. E. Mochalova a M. M. Shemyakin and Yu. A. Ovchinnikov Institute of Bioorganic Chemistry
of the Russian Academy of Sciences, Moscow
b Research Institute of Transplantology and Artificial Organs
c Moscow Institute of Physics and Technology (National Research University), Dolgoprudny, Moscow Region
Abstract:
A system of a low-profile SPM-deflectometer (SPM - scanning probe microscopy) which makes it possible to increase the aperture of the supplied objectives to the currently record value $NA$ = 0.75 has been developed, manufactured and tested. The introduction of such a system will significantly improve the performance of optical techniques for combined SPM / optical microspectroscopy systems.
Keywords:
scanning probe microscopy, optical microspectroscopy, correlation microscopy, SPM-deflectometer.
Received: 09.10.2020 Revised: 03.12.2020 Accepted: 03.12.2020
Citation:
A. V. Mezin, A. E. Efimov, D. O. Solovyeva, I. S. Vaskan, V. A. Oleǐnikov, K. E. Mochalov, “Developing low-profile deflectometer for combined scanning probe and optical microscopy systems”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:6 (2021), 23–25; Tech. Phys. Lett., 47:4 (2021), 287–289
Linking options:
https://www.mathnet.ru/eng/pjtf4826 https://www.mathnet.ru/eng/pjtf/v47/i6/p23
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