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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 6, Pages 23–25
DOI: https://doi.org/10.21883/PJTF.2021.06.50753.18577
(Mi pjtf4826)
 

This article is cited in 1 scientific paper (total in 1 paper)

Developing low-profile deflectometer for combined scanning probe and optical microscopy systems

A. V. Mezina, A. E. Efimovb, D. O. Solovyevaa, I. S. Vaskanac, V. A. Oleĭnikova, K. E. Mochalova

a M. M. Shemyakin and Yu. A. Ovchinnikov Institute of Bioorganic Chemistry of the Russian Academy of Sciences, Moscow
b Research Institute of Transplantology and Artificial Organs
c Moscow Institute of Physics and Technology (National Research University), Dolgoprudny, Moscow Region
Abstract: A system of a low-profile SPM-deflectometer (SPM - scanning probe microscopy) which makes it possible to increase the aperture of the supplied objectives to the currently record value $NA$ = 0.75 has been developed, manufactured and tested. The introduction of such a system will significantly improve the performance of optical techniques for combined SPM / optical microspectroscopy systems.
Keywords: scanning probe microscopy, optical microspectroscopy, correlation microscopy, SPM-deflectometer.
Funding agency Grant number
Russian Science Foundation 18-19-00718
This work was supported in part by the Russian Science Foundation, project no. 18-19-00718.
Received: 09.10.2020
Revised: 03.12.2020
Accepted: 03.12.2020
English version:
Technical Physics Letters, 2021, Volume 47, Issue 4, Pages 287–289
DOI: https://doi.org/10.1134/S1063785021030238
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Mezin, A. E. Efimov, D. O. Solovyeva, I. S. Vaskan, V. A. Oleǐnikov, K. E. Mochalov, “Developing low-profile deflectometer for combined scanning probe and optical microscopy systems”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:6 (2021), 23–25; Tech. Phys. Lett., 47:4 (2021), 287–289
Citation in format AMSBIB
\Bibitem{MezEfiSol21}
\by A.~V.~Mezin, A.~E.~Efimov, D.~O.~Solovyeva, I.~S.~Vaskan, V.~A.~Ole{\v\i}nikov, K.~E.~Mochalov
\paper Developing low-profile deflectometer for combined scanning probe and optical microscopy systems
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 47
\issue 6
\pages 23--25
\mathnet{http://mi.mathnet.ru/pjtf4826}
\crossref{https://doi.org/10.21883/PJTF.2021.06.50753.18577}
\elib{https://elibrary.ru/item.asp?id=46301746}
\transl
\jour Tech. Phys. Lett.
\yr 2021
\vol 47
\issue 4
\pages 287--289
\crossref{https://doi.org/10.1134/S1063785021030238}
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  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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