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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 12, Pages 31–33
DOI: https://doi.org/10.21883/PJTF.2021.12.51064.18748 (Mi pjtf4760) 		 
This article is cited in 1 scientific paper (total in 1 paper)

Nanostructuring at oblique angle deposition of aluminum

O. S. Trushina, A. A. Popova, A. N. Pestovaa, L. A. Mazaletskya, A. A. Akulovb

a Yaroslavl branch of the Institute of physics and technology, Institution of Russian academy of sciences
b P.G. Demidov Yaroslavl State University
Full-text PDF (557 kB) Citations (1)
DOI: https://doi.org/10.21883/PJTF.2021.12.51064.18748
Abstract: Formation of regular arrays of nanorods with high aspect ratio (length to transverse size) has been found in the process of Al thin film growth at oblique angle deposition on silicon substrate by the method of electron beam evaporation. It was found that the optimal conditions for nanostructuring are realized at the inclination angle larger than 80 degrees.
Keywords: aluminum film, electron beam evaporation, oblique deposition, shadowing effect, nanostructuring.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 0066-2019-0003
This work was carried out under in the framework of State Order (project no. 0066-2019-0003) of the Ministry of Science and Higher Education of Russia on equipment of the center for collective use of scientific equipment “Diagnostics of micro- and nanostructures”.
Received: 01.03.2021
Revised: 22.03.2021
Accepted: 23.03.2021
English version:
Technical Physics Letters, 2021, Volume 47, Issue 8, Pages 617–619
DOI: https://doi.org/10.1134/S1063785021060250
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: O. S. Trushin, A. A. Popov, A. N. Pestova, L. A. Mazaletsky, A. A. Akulov, “Nanostructuring at oblique angle deposition of aluminum”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:12 (2021), 31–33; Tech. Phys. Lett., 47:8 (2021), 617–619
Citation in format AMSBIB
\Bibitem{TruPopPes21}
\by O.~S.~Trushin, A.~A.~Popov, A.~N.~Pestova, L.~A.~Mazaletsky, A.~A.~Akulov
\paper Nanostructuring at oblique angle deposition of aluminum
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 47
\issue 12
\pages 31--33
\mathnet{http://mi.mathnet.ru/pjtf4760}
\crossref{https://doi.org/10.21883/PJTF.2021.12.51064.18748}
\elib{https://elibrary.ru/item.asp?id=46321834}
\transl
\jour Tech. Phys. Lett.
\yr 2021
\vol 47
\issue 8
\pages 617--619
\crossref{https://doi.org/10.1134/S1063785021060250}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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