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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 12, Pages 27–30
DOI: https://doi.org/10.21883/PJTF.2021.12.51063.18765
(Mi pjtf4759)
 

This article is cited in 2 scientific papers (total in 2 papers)

Gallium diffusion flow direction during deposition on the surface with regular hole arrays

V. G. Dubrovskii

Saint Petersburg State University
Full-text PDF (367 kB) Citations (2)
Abstract: Autocalytic growth of GaAs and GaP semiconductor nanowires is frequently carried out using SiO$_x$/Si(111) substrates with lithographically prepared hole arrays, on which Ga droplets are created by preliminary deposition in the absence of As flow. It was previously believed that the diffusion flow of gallium is directed from the mask to holes. In the present work, it has been shown that the direction of this diffusion flow can vary depending on the growth parameters. The proposed model is applicable to description of the time of droplet incubation and can explain long-term delay in the growth of droplets and nucleation of nanowires.
Keywords: surface diffusion, hole arrays, silicon oxide layer, gallium droplets.
Funding agency Grant number
Russian Foundation for Basic Research 20-52-16301
20-02-00351
18-02-40006
This work was supported in part by the Russian Foundation for Basic Research, projects nos. 20-52-16301, 20-02-00351, and 18-02-40006.
Received: 12.03.2021
Revised: 12.03.2021
Accepted: 22.03.2021
English version:
Technical Physics Letters, 2021, Volume 47, Issue 8, Pages 601–604
DOI: https://doi.org/10.1134/S1063785021060213
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. G. Dubrovskii, “Gallium diffusion flow direction during deposition on the surface with regular hole arrays”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:12 (2021), 27–30; Tech. Phys. Lett., 47:8 (2021), 601–604
Citation in format AMSBIB
\Bibitem{Dub21}
\by V.~G.~Dubrovskii
\paper Gallium diffusion flow direction during deposition on the surface with regular hole arrays
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 47
\issue 12
\pages 27--30
\mathnet{http://mi.mathnet.ru/pjtf4759}
\crossref{https://doi.org/10.21883/PJTF.2021.12.51063.18765}
\elib{https://elibrary.ru/item.asp?id=46321833}
\transl
\jour Tech. Phys. Lett.
\yr 2021
\vol 47
\issue 8
\pages 601--604
\crossref{https://doi.org/10.1134/S1063785021060213}
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  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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