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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 14, Pages 18–20
DOI: https://doi.org/10.21883/PJTF.2021.14.51181.18724 (Mi pjtf4731) 		 
This article is cited in 5 scientific papers (total in 5 papers)

Laser etching of germanium

V. Yu. Zheleznova, T. V. Malinskiya, S. I. Mikolutskiya, V. E. Rogalina, S. A. Filina, Yu. V. Khomicha, V. A. Yamshchikova, I. A. Kaplunovb, A. I. Ivanovab

a Institute of Problems of Electrophysics of the Russian Academy of Sciences, St. Petersburg
b Tver State University
Full-text PDF (1474 kB) Citations (5)
DOI: https://doi.org/10.21883/PJTF.2021.14.51181.18724
Abstract: Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities ($E$ $\sim$ 0.5 – 1.15 J/cm$^2$) in the absence of noticeable traces of crater formation. It is suggested that the ablation centers nucleate on dislocations escaping at the surface of germanium crystals.
Keywords: UV laser, nanosecond pulse, optical damage threshold, ablation, laser etching, germanium single crystal.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 0057-2019-0005
0817-2020-0007
This work was carried out in the framework of a state order in in science (projects nos. 0057-2019-0005 and 0817-2020-0007) using the resources of the Center for Collective Use of Tver State University.
Received: 03.02.2021
Revised: 11.04.2021
Accepted: 12.04.2021
English version:
Technical Physics Letters, 2021, Volume 47, Issue 10, Pages 734–736
DOI: https://doi.org/10.1134/S1063785021070282
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. Yu. Zheleznov, T. V. Malinskiy, S. I. Mikolutskiy, V. E. Rogalin, S. A. Filin, Yu. V. Khomich, V. A. Yamshchikov, I. A. Kaplunov, A. I. Ivanova, “Laser etching of germanium”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:14 (2021), 18–20; Tech. Phys. Lett., 47:10 (2021), 734–736
Citation in format AMSBIB
\Bibitem{ZheMalMik21}
\by V.~Yu.~Zheleznov, T.~V.~Malinskiy, S.~I.~Mikolutskiy, V.~E.~Rogalin, S.~A.~Filin, Yu.~V.~Khomich, V.~A.~Yamshchikov, I.~A.~Kaplunov, A.~I.~Ivanova
\paper Laser etching of germanium
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 47
\issue 14
\pages 18--20
\mathnet{http://mi.mathnet.ru/pjtf4731}
\crossref{https://doi.org/10.21883/PJTF.2021.14.51181.18724}
\elib{https://elibrary.ru/item.asp?id=46333466}
\transl
\jour Tech. Phys. Lett.
\yr 2021
\vol 47
\issue 10
\pages 734--736
\crossref{https://doi.org/10.1134/S1063785021070282}
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    • This publication is cited in the following 5 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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