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This article is cited in 6 scientific papers (total in 6 papers)
High-precision characterization of super-multiperiod AlGaAs/GaAs superlattices using X-ray reflectometry on a synchrotron source
L. I. Gorayab, E. V. Pirogova, M. V. Svechnikovc, M. S. Soboleva, N. K. Polyakovab, L. G. Gerchikovad, E. V. Nikitinaa, A. S. Dashkova, M. M. Borisove, S. N. Yakunine, A. D. Bouravlevbfgh a Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg
b Institute for Analytical Instrumentation, Russian Academy of Sciences, St. Petersburg
c Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
d Peter the Great St. Petersburg Polytechnic University
e National Research Centre "Kurchatov Institute", Moscow
f University associated with IA EAEC, St. Petersburg, Russia
g Ioffe Institute, St. Petersburg
h Saint Petersburg Electrotechnical University "LETI"
Abstract:
The morphology of Al$_{0.3}$Ga$_{0.7}$As/GaAs superlattices grown by molecular beam epitaxy was determined by X-ray reflectometry (including a synchrotron radiation source) and photoluminescence. The thicknesses of the superlattice layers with 100 periods, found using laboratory and synchrotron studies, correlate with an accuracy of $\sim$1%. At the synchrotron, beginning with high ($>$ 4 – 5) Bragg orders, reflection peaks were found that are not observed in measurements with a diffractometer and are apparently associated with the technological features of the growth of such structures. It follows from the analysis that the peaks correspond to modulation in the superlattice with a period
3 – 5 times greater and characterize the scatter of the thicknesses over the structure depth by several percent.
Keywords:
AlGaAs/GaAs superlattice, molecular beam epitaxy, X-ray reflectometry, synchrotron radiation source, photoluminescence.
Received: 12.04.2021 Revised: 26.04.2021 Accepted: 27.04.2021
Citation:
L. I. Goray, E. V. Pirogov, M. V. Svechnikov, M. S. Sobolev, N. K. Polyakov, L. G. Gerchikov, E. V. Nikitina, A. S. Dashkov, M. M. Borisov, S. N. Yakunin, A. D. Bouravlev, “High-precision characterization of super-multiperiod AlGaAs/GaAs superlattices using X-ray reflectometry on a synchrotron source”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:15 (2021), 7–10; Tech. Phys. Lett., 47:10 (2021), 757–760
Linking options:
https://www.mathnet.ru/eng/pjtf4715 https://www.mathnet.ru/eng/pjtf/v47/i15/p7
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