Structural characterization of a short-period superlattice based on the CdF$_{2}$/CaF$_{2}$/Si(111) heterostructure by transmission electron microscopy and X-ray diffractometry

A detailed study of the structure of a short-period superlattice based on alternating layers of cadmium and calcium fluorides, grown by molecular beam epitaxy on a Si (111) substrate, by transmission electron microscopy and X-ray diffractometry, has been carried out. It was found that the superlattice is in a pseudomorphic state, and a lateral inhomogeneity with a fragment size of 10 – 40 nm was found. The reason for the broadening of the main and satellite peaks of the SL on the (111) diffraction curve has been clarified.