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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 21, Pages 36–38
DOI: https://doi.org/10.21883/PJTF.2021.21.51627.18939 (Mi pjtf4640) 		 
Mushroom mesa structure for InAlAs/InGaAs avalanche photodiodes

N. A. Maleevab, A. G. Kuz'menkovc, M. M. Kulaginaa, A. P. Vasil'evc, S. A. Blokhinac, S. I. Troshkova, A. V. Nashchekina, M. A. Bobrova, A. A. Blokhina, K. O. Voropaevd, V. E. Bugrovb, V. M. Ustinovc

a Ioffe Institute, St. Petersburg
b St. Petersburg National Research University of Information Technologies, Mechanics and Optics
c Submicron Heterostructures for Microelectronics Research and Engineering Center, Russian Academy of Sciences, St. Petersburg
d JSC OKB-Planeta, Velikii Novgorod
Full-text PDF (620 kB)
DOI: https://doi.org/10.21883/PJTF.2021.21.51627.18939
Abstract: Mushroom mesa structure for InAlAs/InGaAs avalanche photodiodes (APD) was proposed and investigated. APD heterostructrures were grown by molecular-beam epitaxy. Fabricated APDs with sensitive area diameter of about 30 micron were passivated by SiN deposition and demonstrate avalanche breakdown voltage Vbr $\sim$70–80 V. At applied bias of 0.9 Vbr the dark current was $\sim$75–200 nA. The single-mode coupled APDs demonstrate responsivity at a gain of unity is high than 0.5A/W at 1550 nm.
Keywords: avalanche photodiode, mesa structure, dark current.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 2019-1442
Received: 28.06.2021
Revised: 28.06.2021
Accepted: 19.07.2021
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: N. A. Maleev, A. G. Kuz'menkov, M. M. Kulagina, A. P. Vasil'ev, S. A. Blokhin, S. I. Troshkov, A. V. Nashchekin, M. A. Bobrov, A. A. Blokhin, K. O. Voropaev, V. E. Bugrov, V. M. Ustinov, “Mushroom mesa structure for InAlAs/InGaAs avalanche photodiodes”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:21 (2021), 36–38
Citation in format AMSBIB
\Bibitem{MalKuzKul21}
\by N.~A.~Maleev, A.~G.~Kuz'menkov, M.~M.~Kulagina, A.~P.~Vasil'ev, S.~A.~Blokhin, S.~I.~Troshkov, A.~V.~Nashchekin, M.~A.~Bobrov, A.~A.~Blokhin, K.~O.~Voropaev, V.~E.~Bugrov, V.~M.~Ustinov
\paper Mushroom mesa structure for InAlAs/InGaAs avalanche photodiodes
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 47
\issue 21
\pages 36--38
\mathnet{http://mi.mathnet.ru/pjtf4640}
\crossref{https://doi.org/10.21883/PJTF.2021.21.51627.18939}
\elib{https://elibrary.ru/item.asp?id=46640008 }
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