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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1991, Volume 17, Issue 2, Pages 56–61 (Mi pjtf3638)  
This article is cited in 1 scientific paper (total in 1 paper)

ARSENIC IMPLANTATION TO SILICON THROUGH POWERFUL KRF LASER-EMISSION

V. L. Kantsyrev, N. V. Morozov, B. A. Olshvanger, P. B. Sergeev, M. A. Tyunina
Full-text PDF (493 kB) Citations (1)
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Document Type: Article
Language: Russian
Citation: V. L. Kantsyrev, N. V. Morozov, B. A. Olshvanger, P. B. Sergeev, M. A. Tyunina, “ARSENIC IMPLANTATION TO SILICON THROUGH POWERFUL KRF LASER-EMISSION”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 17:2 (1991), 56–61
Citation in format AMSBIB
\Bibitem{Kan91}
\by V.~L.~Kantsyrev, N.~V.~Morozov, B.~A.~Olshvanger, P.~B.~Sergeev, M.~A.~Tyunina
\paper ARSENIC IMPLANTATION TO SILICON THROUGH POWERFUL KRF LASER-EMISSION
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 1991
\vol 17
\issue 2
\pages 56--61
\mathnet{http://mi.mathnet.ru/pjtf3638}
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  • https://www.mathnet.ru/eng/pjtf/v17/i2/p56
    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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