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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1990, Volume 16, Issue 19, Pages 66–69
(Mi pjtf3480)
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STABILITY OF PROPERTIES (COMPOSITION, STRUCTURE) OF HYDROGEN-PASSIVATED
SI(001) SURFACE DURING PREEPITAXIAL THERMAL-TREATMENT
V. G. Antipov, R. V. Kallion, S. A. Nikishin, D. V. Sinyavskii
Citation:
V. G. Antipov, R. V. Kallion, S. A. Nikishin, D. V. Sinyavskii, “STABILITY OF PROPERTIES (COMPOSITION, STRUCTURE) OF HYDROGEN-PASSIVATED
SI(001) SURFACE DURING PREEPITAXIAL THERMAL-TREATMENT”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 16:19 (1990), 66–69
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https://www.mathnet.ru/eng/pjtf3480 https://www.mathnet.ru/eng/pjtf/v16/i19/p66
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