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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1990, Volume 16, Issue 2, Pages 47–53 (Mi pjtf3074)  
ANISOTROPIC LOCAL FUSION OF IMPLANTED SILICON - STRUCTURAL AND THERMOPLASTIC EFFECTS

Y. V. Fattakhov, T. N. Vasileva, I. B. Khaibullin
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Document Type: Article
Language: Russian
Citation: Y. V. Fattakhov, T. N. Vasileva, I. B. Khaibullin, “ANISOTROPIC LOCAL FUSION OF IMPLANTED SILICON - STRUCTURAL AND THERMOPLASTIC EFFECTS”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 16:2 (1990), 47–53
Citation in format AMSBIB
\Bibitem{1}
\by Y.~V.~Fattakhov, T.~N.~Vasileva, I.~B.~Khaibullin
\paper ANISOTROPIC LOCAL FUSION OF IMPLANTED SILICON - STRUCTURAL AND
THERMOPLASTIC EFFECTS
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 1990
\vol 16
\issue 2
\pages 47--53
\mathnet{http://mi.mathnet.ru/pjtf3074}
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