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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1989, Volume 15, Issue 17, Pages 55–57
(Mi pjtf2859)
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ELECTRON-BEAM METHOD OF TRANSFER OF A PATTERN DRAWING WITH
APPROXIMATELY-0,1-MU-M ELEMENTS ON SEMICONDUCTING PLATES
K. A. Valiev, L. V. Velikov, R. K. Makhmutov, S. N. Sidoruk, V. S. Yakunin
Citation:
K. A. Valiev, L. V. Velikov, R. K. Makhmutov, S. N. Sidoruk, V. S. Yakunin, “ELECTRON-BEAM METHOD OF TRANSFER OF A PATTERN DRAWING WITH
APPROXIMATELY-0,1-MU-M ELEMENTS ON SEMICONDUCTING PLATES”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 15:17 (1989), 55–57
Linking options:
https://www.mathnet.ru/eng/pjtf2859 https://www.mathnet.ru/eng/pjtf/v15/i17/p55
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