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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1989, Volume 15, Issue 17, Pages 55–57 (Mi pjtf2859)  
ELECTRON-BEAM METHOD OF TRANSFER OF A PATTERN DRAWING WITH APPROXIMATELY-0,1-MU-M ELEMENTS ON SEMICONDUCTING PLATES

K. A. Valiev, L. V. Velikov, R. K. Makhmutov, S. N. Sidoruk, V. S. Yakunin
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Document Type: Article
Language: Russian
Citation: K. A. Valiev, L. V. Velikov, R. K. Makhmutov, S. N. Sidoruk, V. S. Yakunin, “ELECTRON-BEAM METHOD OF TRANSFER OF A PATTERN DRAWING WITH APPROXIMATELY-0,1-MU-M ELEMENTS ON SEMICONDUCTING PLATES”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 15:17 (1989), 55–57
Citation in format AMSBIB
\Bibitem{Val89}
\by K.~A.~Valiev, L.~V.~Velikov, R.~K.~Makhmutov, S.~N.~Sidoruk, V.~S.~Yakunin
\paper ELECTRON-BEAM METHOD OF TRANSFER OF A PATTERN DRAWING WITH
APPROXIMATELY-0,1-MU-M ELEMENTS ON SEMICONDUCTING PLATES
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 1989
\vol 15
\issue 17
\pages 55--57
\mathnet{http://mi.mathnet.ru/pjtf2859}
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