|
Pisma v Zhurnal Tekhnicheskoi Fiziki, 1989, Volume 15, Issue 17, Pages 13–17
(Mi pjtf2848)
|
|
|
|
DYNAMICS OF FUSION AND CRYSTALLIZATION OF THIN AMORPHOUS IMPLANTED
SILICON LAYERS UNDER NANOSECOND LASER-PULSES
S. Yu. Karpov, Yu. V. Koval'chuk, V. E. Myachin, Yu. V. Pogorel'skii, M. Y. Silova, I. A. Sokolov, M. I. Etinberg
Citation:
S. Yu. Karpov, Yu. V. Koval'chuk, V. E. Myachin, Yu. V. Pogorel'skii, M. Y. Silova, I. A. Sokolov, M. I. Etinberg, “DYNAMICS OF FUSION AND CRYSTALLIZATION OF THIN AMORPHOUS IMPLANTED
SILICON LAYERS UNDER NANOSECOND LASER-PULSES”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 15:17 (1989), 13–17
Linking options:
https://www.mathnet.ru/eng/pjtf2848 https://www.mathnet.ru/eng/pjtf/v15/i17/p13
|
|