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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1989, Volume 15, Issue 6, Pages 72–76 (Mi pjtf2598)  
ANALYSIS OF ELASTIC TENSION DISTRIBUTION UNDER PLANAR GETTERING OF SILICONE STRUCTURES

V. V. Artamonov, M. Ya. Valakh, B. N. Romanyuk, I. V. Rudskoi, V. V. Strelchuk
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Document Type: Article
Language: Russian
Citation: V. V. Artamonov, M. Ya. Valakh, B. N. Romanyuk, I. V. Rudskoi, V. V. Strelchuk, “ANALYSIS OF ELASTIC TENSION DISTRIBUTION UNDER PLANAR GETTERING OF SILICONE STRUCTURES”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 15:6 (1989), 72–76
Citation in format AMSBIB
\Bibitem{ArtValRud89}
\by V.~V.~Artamonov, M.~Ya.~Valakh, B.~N.~Romanyuk, I.~V.~Rudskoi, V.~V.~Strelchuk
\paper ANALYSIS OF ELASTIC TENSION DISTRIBUTION UNDER PLANAR GETTERING OF
SILICONE STRUCTURES
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 1989
\vol 15
\issue 6
\pages 72--76
\mathnet{http://mi.mathnet.ru/pjtf2598}
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