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Fizika i Tekhnika Poluprovodnikov, 1987, Volume 21, Issue 7, Pages 1238–1241
(Mi phts776)
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Boron and Hydrogen Anomalous Distribution at Considerable Depths in Silicon after Diffusion Stimulated by Proton-Irradiation
V. V. Kozlovskii, V. N. Lomasov, G. M. Guryanov, A. P. Kovarskii
Citation:
V. V. Kozlovskii, V. N. Lomasov, G. M. Guryanov, A. P. Kovarskii, “Boron and Hydrogen Anomalous Distribution at Considerable Depths in Silicon after Diffusion Stimulated by Proton-Irradiation”, Fizika i Tekhnika Poluprovodnikov, 21:7 (1987), 1238–1241
Linking options:
https://www.mathnet.ru/eng/phts776 https://www.mathnet.ru/eng/phts/v21/i7/p1238
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Statistics & downloads: |
Abstract page: | 36 | Full-text PDF : | 22 |
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