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Fizika i Tekhnika Poluprovodnikov, 2020, Volume 54, Issue 12, Page 1390 (Mi phts6689)  
This article is cited in 4 scientific papers (total in 4 papers)

NANOSTRUCTURES : PHYSICS AND TECHNOLOGY 28th International Symposium (Minsk, Republic of Belarus, September, 2020)
Nanostructure Characterization

Calculation of the Ga+ FIB ion dose distribution by SEM image

M. I. Mitrofanova, G. V. Voznyuka, S. N. Rodina, W. V. Lundina, V. P. Evtikhieva, A. F. Tsatsulnikovb, M. A. Kaliteevskic

a Ioffe Institute, 194021 St. Petersburg, Russia
b SHM R&E Center, Russian Academy of Sciences, 199034 St. Petersburg, Russia
c ITMO University, 197101 St. Petersburg, Russia
Full-text PDF (25 kB) Citations (4)
Abstract: A new approach for calculating the ion dose spatial distribution of the focused ion beam is proposed. The approach is based on the analysis of the secondary electron microscopy image of the area irradiated by the focused ion beam.
Keywords: FIB, focused ion beam distribution, ion beam lithography.
Funding agency Grant number
Russian Science Foundation 16-12-10503
M.A. Kaliteevski is grateful to the Russian Science Foundation for supporting the work (grant no. 16-12-10503).
Received: 23.06.2020
Revised: 23.07.2020
Accepted: 27.07.2020
English version:
Semiconductors, 2020, Volume 54, Issue 12, Pages 1682–1684
DOI: https://doi.org/10.1134/S1063782620120246
Document Type: Article
Language: English
Citation: M. I. Mitrofanov, G. V. Voznyuk, S. N. Rodin, W. V. Lundin, V. P. Evtikhiev, A. F. Tsatsulnikov, M. A. Kaliteevski, “Calculation of the Ga+ FIB ion dose distribution by SEM image”, Fizika i Tekhnika Poluprovodnikov, 54:12 (2020), 1390; Semiconductors, 54:12 (2020), 1682–1684
Citation in format AMSBIB
\Bibitem{MitVozRod20}
\by M.~I.~Mitrofanov, G.~V.~Voznyuk, S.~N.~Rodin, W.~V.~Lundin, V.~P.~Evtikhiev, A.~F.~Tsatsulnikov, M.~A.~Kaliteevski
\paper Calculation of the Ga+ FIB ion dose distribution by SEM image
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2020
\vol 54
\issue 12
\pages 1390
\mathnet{http://mi.mathnet.ru/phts6689}
\transl
\jour Semiconductors
\yr 2020
\vol 54
\issue 12
\pages 1682--1684
\crossref{https://doi.org/10.1134/S1063782620120246}
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    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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