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Fizika i Tekhnika Poluprovodnikov, 2021, Volume 55, Issue 5, Page 442 (Mi phts6606)  

This article is cited in 1 scientific paper (total in 1 paper)

Surface, interfaces, thin films

Bulk Fin-FET strategy at distinct nanometer regime for measurement of short-channel effects

S. M. Jagtapa, V. J. Gondb

a E and TC Department, MVPS’s KBT College of Engineering, Nashik, India
b E and TC Department, MET’s Trust Bhujbal Knowledge City College of Engineering, Nashik, India
Full-text PDF (28 kB) Citations (1)
Abstract: The planar structure of MOSFET invites uncertainties that can’t reduce the short-channel effects (SCE) like drain-induced barrier lowering (DIBL), punch through, and sub-threshold slope (SS). Fin-FET technology can be a better choice. It is a technology that uses more than one gate, called multiple gate devices, which is an improved technology option for further shrinking the size of the planar MOSFET. In this work, we inspect possibilities of gate-length and fin-thickness scaling in triple-gate single Fin-FET device design to solve the problem of SCE and progress the performance of the nanoscale device. The electrical characteristic parameters of the nanoscale device like threshold voltage, SS, DIBL, and leakage current are evaluated from DC characteristics (transfer and output) by proposed design. The findings offer the drain-induced barrier lowering, threshold voltage, and leakage current by calculation. From the simulation results, we observe lowering of DIBL, SS, and leakage current, whereas threshold voltages rise. A triple-gate N-Fin-FET is designed with different fin thickness and gate length in scaling with 14, 10, and 7 nm, and the effects are observed on the improved performance of the device. 3D Single Fin-FET structure is designed successfully, and we plot the current–voltage I–V output and transfer characteristics.
Keywords: SCE, modeling, BSIM-CMG, ITRS, DIBL, threshold voltage.
Received: 05.10.2020
Revised: 05.10.2020
Accepted: 29.10.2020
English version:
Semiconductors, 2021, Volume 55, Issue 5, Pages 504–510
DOI: https://doi.org/10.1134/S1063782621050080
Document Type: Article
Language: English
Citation: S. M. Jagtap, V. J. Gond, “Bulk Fin-FET strategy at distinct nanometer regime for measurement of short-channel effects”, Fizika i Tekhnika Poluprovodnikov, 55:5 (2021), 442; Semiconductors, 55:5 (2021), 504–510
Citation in format AMSBIB
\Bibitem{JagGon21}
\by S.~M.~Jagtap, V.~J.~Gond
\paper Bulk Fin-FET strategy at distinct nanometer regime for measurement of short-channel effects
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2021
\vol 55
\issue 5
\pages 442
\mathnet{http://mi.mathnet.ru/phts6606}
\transl
\jour Semiconductors
\yr 2021
\vol 55
\issue 5
\pages 504--510
\crossref{https://doi.org/10.1134/S1063782621050080}
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  • https://www.mathnet.ru/eng/phts/v55/i5/p442
  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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