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Fizika i Tekhnika Poluprovodnikov, 2016, Volume 50, Issue 1, Pages 138–142 (Mi phts6575)  
This article is cited in 7 scientific papers (total in 7 papers)

Manufacturing, processing, testing of materials and structures

Formation of graphite/SiC structures by the thermal decomposition of silicon carbide

M. G. Mynbaevaab, A. A. Lavrent'eva, K. J. Mynbaevba

a Ioffe Institute, St. Petersburg
b St. Petersburg National Research University of Information Technologies, Mechanics and Optics
Full-text PDF (759 kB) Citations (7)
Abstract: The conditions in which carbon layers are synthesized on the surface of silicon carbide (SiC) wafers by thermal decomposition are studied. The effect of temperature and composition of the gas atmosphere on the structural properties of the layers being synthesized is analyzed. The conditions in which continuous graphite films with both single-crystal and polycrystalline structure can be obtained are determined.
Received: 06.05.2015
Accepted: 18.05.2015
English version:
Semiconductors, 2016, Volume 50, Issue 1, Pages 138–142
DOI: https://doi.org/10.1134/S1063782616010176
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. G. Mynbaeva, A. A. Lavrent'ev, K. J. Mynbaev, “Formation of graphite/SiC structures by the thermal decomposition of silicon carbide”, Fizika i Tekhnika Poluprovodnikov, 50:1 (2016), 138–142; Semiconductors, 50:1 (2016), 138–142
Citation in format AMSBIB
\Bibitem{MynLavMyn16}
\by M.~G.~Mynbaeva, A.~A.~Lavrent'ev, K.~J.~Mynbaev
\paper Formation of graphite/SiC structures by the thermal decomposition of silicon carbide
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2016
\vol 50
\issue 1
\pages 138--142
\mathnet{http://mi.mathnet.ru/phts6575}
\elib{https://elibrary.ru/item.asp?id=25668062}
\transl
\jour Semiconductors
\yr 2016
\vol 50
\issue 1
\pages 138--142
\crossref{https://doi.org/10.1134/S1063782616010176}
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  • https://www.mathnet.ru/eng/phts/v50/i1/p138
    • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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