On the electrical and optical properties of oxide nanolayers produced by the thermal oxidation of metal tin

Thin SnO$_{2–x}$ layers, 30 nm in thickness, are produced by the thermal oxidation of metal tin nanolayers at a temperature of 450–750$^\circ$C. The electrical and optical properties of the layers are studied. During the thermal oxidation of tin nanolayers, an unsteady variation in their conductivity is observed. For the oxide films produced at 450 and 550$^\circ$C, an absorption band at 340 nm (3.65 eV) is detected in the optical spectra. The conductivity-activation energy is determined for samples oxidized to different degrees. On the basis of experimental data and the data reported in publications, an oxidation mechanism controlling the properties of Sn nanolayers is proposed.