Specific features of doping with antimony during the ion-beam crystallization of silicon

A method of doping during the growth of thin films by ion-beam crystallization is proposed. By the example of Si and Sb, the possibility of controllably doping semiconductors during the ion-beam crystallization process is shown. A calibrated temperature dependence of the antimony vapor flow rate in the range from 150 to 400$^\circ$C is obtained. It is established that, an increase in the evaporator temperature above 200$^\circ$C brings about the accumulation of impurities in the layer growth direction. Silicon layers doped with antimony to a concentration of 10$^{18}$ cm$^{-3}$ are grown. It is shown that, as the evaporator temperature is increased, the efficiency of the activation of antimony in silicon nonlinearly decreases from $\sim$100 to $\sim$10$^{-3}$.