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Fizika i Tekhnika Poluprovodnikov, 2016, Volume 50, Issue 8, Pages 1133–1137 (Mi phts6400)  
This article is cited in 6 scientific papers (total in 6 papers)

Manufacturing, processing, testing of materials and structures

On a silicon-based photonic-crystal cavity for the near-IR region: Numerical simulation and formation technology

P. G. Serafimovichab, M. V. Stepikhovacd, N. L. Kazanskiiab, S. A. Gusevcd, A. V. Egorovb, E. V. Skorokhodovcd, Z. F. Krasil'nikdc

a Image Processing Systems Institute, Russian Academy of Sciences, Samara
b Samara State Aerospace University
c Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
d Lobachevsky State University of Nizhny Novgorod
Full-text PDF (630 kB) Citations (6)
Abstract: The production technology of a photonic-crystal cavity formed as a group of holes in a silicon strip waveguide by ion-beam etching is described. The parasitic effect associated with hole conicity which develops upon hole formation by the given technology is studied. Numerical simulation shows that the hole-conicityinduced decrease in the cavity quality factor can be compensated with consideration for the hole volume. The influence of the waveguide thickness on the resonance wavelength and quality factor of the photonic-crystal cavity is analyzed.
Received: 17.12.2015
Accepted: 24.12.2015
English version:
Semiconductors, 2016, Volume 50, Issue 8, Pages 1112–1116
DOI: https://doi.org/10.1134/S1063782616080212
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: P. G. Serafimovich, M. V. Stepikhova, N. L. Kazanskii, S. A. Gusev, A. V. Egorov, E. V. Skorokhodov, Z. F. Krasil'nik, “On a silicon-based photonic-crystal cavity for the near-IR region: Numerical simulation and formation technology”, Fizika i Tekhnika Poluprovodnikov, 50:8 (2016), 1133–1137; Semiconductors, 50:8 (2016), 1112–1116
Citation in format AMSBIB
\Bibitem{SerSteKaz16}
\by P.~G.~Serafimovich, M.~V.~Stepikhova, N.~L.~Kazanskii, S.~A.~Gusev, A.~V.~Egorov, E.~V.~Skorokhodov, Z.~F.~Krasil'nik
\paper On a silicon-based photonic-crystal cavity for the near-IR region: Numerical simulation and formation technology
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2016
\vol 50
\issue 8
\pages 1133--1137
\mathnet{http://mi.mathnet.ru/phts6400}
\elib{https://elibrary.ru/item.asp?id=27368975}
\transl
\jour Semiconductors
\yr 2016
\vol 50
\issue 8
\pages 1112--1116
\crossref{https://doi.org/10.1134/S1063782616080212}
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  • https://www.mathnet.ru/eng/phts/v50/i8/p1133
    • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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