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Fizika i Tekhnika Poluprovodnikov, 2016, Volume 50, Issue 9, Pages 1258–1262
(Mi phts6372)
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This article is cited in 1 scientific paper (total in 1 paper)
Manufacturing, processing, testing of materials and structures
Formation of the low-resistivity compound Cu$_{3}$Ge by low-temperature treatment in an atomic hydrogen flux
E. V. Erofeeva, A. I. Kazimirova, I. V. Fedina, V. A. Kagadeib a Research Institute for Electric Communication Systems, Tomsk State University of Control Systems and Radio Electronics, Tomsk, Russia
b Research and Production Company "Micran", Tomsk, Russia
Abstract:
The systematic features of the formation of the low-resistivity compound Cu$_{3}$Ge by low-temperature treatment of a Cu/Ge two-layer system in an atomic hydrogen flux are studied. The Cu/Ge two-layer system is deposited onto an $i$-GaAs substrate. Treatment of the Cu/Ge/$i$-GaAs system, in which the layer thicknesses are, correspondingly, 122 and 78 nm, in atomic hydrogen with a flux density of 10$^{15}$ at cm$^2$ s$^{-1}$ for 2.5–10 min at room temperature induces the interdiffusion of Cu and Ge, with the formation of a polycrystalline film containing the stoichiometric Cu$_{3}$Ge phase. The film consists of vertically oriented grains 100–150 nm in size and exhibits a minimum resistivity of 4.5 $\mu\Omega$ cm. Variations in the time of treatment of the Cu/Ge/i-GaAs samples in atomic hydrogen affect the Cu and Ge depth distribution, the phase composition of the films, and their resistivity. Experimental observation of the synthesis of the Cu$_{3}$Ge compound at room temperature suggests that treatment in atomic hydrogen has a stimulating effect on both the diffusion of Cu and Ge and the chemical reaction of Cu$_{3}$Ge-compound formation. These processes can be activated by the energy released upon the recombination of hydrogen atoms adsorbed at the surface of the Cu/Ge/$i$-GaAs sample.
Received: 18.02.2016 Accepted: 24.02.2016
Citation:
E. V. Erofeev, A. I. Kazimirov, I. V. Fedin, V. A. Kagadei, “Formation of the low-resistivity compound Cu$_{3}$Ge by low-temperature treatment in an atomic hydrogen flux”, Fizika i Tekhnika Poluprovodnikov, 50:9 (2016), 1258–1262; Semiconductors, 50:9 (2016), 1236–1240
Linking options:
https://www.mathnet.ru/eng/phts6372 https://www.mathnet.ru/eng/phts/v50/i9/p1258
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