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Fizika i Tekhnika Poluprovodnikov, 2016, Volume 50, Issue 9, Pages 1178–1184 (Mi phts6358)  
This article is cited in 2 scientific papers (total in 2 papers)

Surface, interfaces, thin films

Relation between the structural and phase transformations in titanium-oxide films and the electrical and photoelectric properties of TiO$_{2}$–Si structures

V. M. Kalygina, I. M. Egorova, V. А. Novikov, I. A. Prudaev, O. P. Tolbanov

Tomsk State University
Full-text PDF (2453 kB) Citations (2)
Abstract: The effect of annealing in argon and oxygen plasma on the I–V characteristics and photoresponse of TiO$_{2}$–Si structures is investigated. The titanium oxide films are prepared by rf magnetron sputtering onto n-Si substrates. The observed features in the behavior of the electrical and photoelectric characteristics of the samples after annealing and treatment in oxygen plasma are attributed to a variation in the phase composition of the oxide film due to the appearance of anatase or rutile crystallites, depending on the treatment conditions.
Received: 16.02.2016
Accepted: 24.02.2016
English version:
Semiconductors, 2016, Volume 50, Issue 9, Pages 1156–1162
DOI: https://doi.org/10.1134/S1063782616090104
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. M. Kalygina, I. M. Egorova, V. А. Novikov, I. A. Prudaev, O. P. Tolbanov, “Relation between the structural and phase transformations in titanium-oxide films and the electrical and photoelectric properties of TiO$_{2}$–Si structures”, Fizika i Tekhnika Poluprovodnikov, 50:9 (2016), 1178–1184; Semiconductors, 50:9 (2016), 1156–1162
Citation in format AMSBIB
\Bibitem{KalEgoNov16}
\by V.~M.~Kalygina, I.~M.~Egorova, V.~А.~Novikov, I.~A.~Prudaev, O.~P.~Tolbanov
\paper Relation between the structural and phase transformations in titanium-oxide films and the electrical and photoelectric properties of TiO$_{2}$--Si structures
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2016
\vol 50
\issue 9
\pages 1178--1184
\mathnet{http://mi.mathnet.ru/phts6358}
\elib{https://elibrary.ru/item.asp?id=27368984}
\transl
\jour Semiconductors
\yr 2016
\vol 50
\issue 9
\pages 1156--1162
\crossref{https://doi.org/10.1134/S1063782616090104}
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  • https://www.mathnet.ru/eng/phts/v50/i9/p1178
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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