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Fizika i Tekhnika Poluprovodnikov, 2016, Volume 50, Issue 12, Page 1726
(Mi phts6302)
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This article is cited in 2 scientific papers (total in 2 papers)
Micro- and nanocrystalline, porous, composite semiconductors
Study of the parameters of nanoscale layers in nanoheterostructures based on II–VI semiconductor compounds
M. B. Karavaev, D. A. Kirilenko, E. V. Ivanova, T. B. Popova, A. A. Sitnikova, I. V. Sedova, M. V. Zamoryanskaya Ioffe Institute, St. Petersburg
Abstract:
Wide-gap ZnSe-based nanoheterostructures grown by molecular-beam epitaxy are studied by local cathodoluminescence and X-ray microanalysis. It is shown that the used methods allow nondestructive determination of the depth, elemental composition, and geometrical parameters of the nanoscale ZnCdSe layer. The accuracy of the results is verified by transmission electron microscopy. The research techniques are based on the possibility of varying the primary electron-beam energy, which results in changes in the regions of characteristic X-ray and cathodoluminescence generation.
Received: 28.05.2016 Accepted: 24.06.2016
Citation:
M. B. Karavaev, D. A. Kirilenko, E. V. Ivanova, T. B. Popova, A. A. Sitnikova, I. V. Sedova, M. V. Zamoryanskaya, “Study of the parameters of nanoscale layers in nanoheterostructures based on II–VI semiconductor compounds”, Fizika i Tekhnika Poluprovodnikov, 50:12 (2016), 1726; Semiconductors, 51:1 (2017), 54–60
Linking options:
https://www.mathnet.ru/eng/phts6302 https://www.mathnet.ru/eng/phts/v50/i12/p1726
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Abstract page: | 46 | Full-text PDF : | 12 |
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