Parameters of ZnO films with $p$-type conductivity deposited by high-frequency magnetron sputtering

It is demonstrated that a reduction in the defect concentration in ZnO films formed by high-frequency magnetron sputtering allows effective doping with acceptor impurities both in the cation (Li) and anion (N$^+$) sublattices and $p$-type conductivity with reproducible charge-carrier parameters (concentration and mobility) to be obtained. ZnO films are doped with nitrogen by annealing in a high-frequency gas discharge atmosphere. Hall measurements by the Van der Pauw technique show that the deposition of thin Eu layers on the ZnO film surface increases the concentration and mobility of majority charge carriers. The embedding of metal impurities with different ionic radii (Ag and Au) in the cation sublattice of the ZnO films to compensate misfit stresses makes it possible to enhance the concentration of radiative-recombination centers.