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This article is cited in 7 scientific papers (total in 7 papers)
Surface, interfaces, thin films
Surface nanostructures forming during the early stages of the metal-assisted chemical etching of silicon. Optical properties of silver nanoparticles
Yu. A. Zharova, V. A. Tolmachev, A. I. Bednaya, S. I. Pavlov Ioffe Institute, St. Petersburg
Abstract:
In this two-part work, nanostructures formed in a three-step process of metal-assisted chemical etching of silicon are investigated. In the first part (present publication), the process of the chemical deposition of a layer of self-assembled silver nanoparticles on the surface of a silicon wafer (the first stage of metalassisted chemical etching) is studied. This layer, on the one hand, serves as a catalyst for the subsequent etching of silicon, and, on the other hand, represents a kind of mask for the formation of a certain topology of the emerging Si nanowires. The morphology of the obtained 40- to 60-nm-thick silver nanoparticle layers is investigated by scanning electron microscopy. The spectral dependences of the ellipsometric angles $\Psi$ and $\Delta$ are measured using spectroscopic ellipsometry ($\lambda$ = 250–900nm), and the complex dielectric function of the silver nanolayers is determined from these spectra. The dielectric function features a characteristic plasmon resonance peak in the ultraviolet spectral range. The study of the optical properties of Si nanofilament layers which form during the early stages of metal-assisted chemical etching will be reported as the second part of this work in a separate publication.
Received: 11.07.2017 Accepted: 19.07.2017
Citation:
Yu. A. Zharova, V. A. Tolmachev, A. I. Bednaya, S. I. Pavlov, “Surface nanostructures forming during the early stages of the metal-assisted chemical etching of silicon. Optical properties of silver nanoparticles”, Fizika i Tekhnika Poluprovodnikov, 52:3 (2018), 333–336; Semiconductors, 52:3 (2018), 316–319
Linking options:
https://www.mathnet.ru/eng/phts5893 https://www.mathnet.ru/eng/phts/v52/i3/p333
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