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Fizika i Tekhnika Poluprovodnikov, 2018, Volume 52, Issue 5, Page 529 (Mi phts5855)  
This article is cited in 4 scientific papers (total in 4 papers)

XXV International Symposium ''Nanostructures: Physics and Technology'', Saint Petersburg, June 26-30, 2017
Nanostructure Technology

Air-oxidation of Nb Nano-Films

A. V. Lubenchenkoa, A. A. Batrakova, D. A. Ivanova, O. I. Lubenchenkoa, I. A. Lashkova, A. B. Pavolotskyb, B. Schleicherc, N. Albertc, K. Nielschc

a National Research University MPEI, 111250 Moscow, Russia
b Chalmers University of Technology, 41296 Goteborg, Sweden
c IFW Dresden, Institute for Metallic Materials, 01069 Dresden, Germany
Full-text PDF (22 kB) Citations (4)
Abstract: X-ray photoelectron spectroscopy (XPS) depth chemical and phase profiling of air-oxidized niobium nanofilms has been performed. It is found that oxide layer thicknesses depend on the initial thickness of the niobium nanofilm. The increase in thickness of the initial Nb nano-layer is due to increase in thickness of an oxidized layer.
English version:
Semiconductors, 2018, Volume 52, Issue 5, Pages 678–682
DOI: https://doi.org/10.1134/S1063782618050196
Bibliographic databases:
Document Type: Article
Language: English
Citation: A. V. Lubenchenko, A. A. Batrakov, D. A. Ivanov, O. I. Lubenchenko, I. A. Lashkov, A. B. Pavolotsky, B. Schleicher, N. Albert, K. Nielsch, “Air-oxidation of Nb Nano-Films”, Fizika i Tekhnika Poluprovodnikov, 52:5 (2018), 529; Semiconductors, 52:5 (2018), 678–682
Citation in format AMSBIB
\Bibitem{LubBatIva18}
\by A.~V.~Lubenchenko, A.~A.~Batrakov, D.~A.~Ivanov, O.~I.~Lubenchenko, I.~A.~Lashkov, A.~B.~Pavolotsky, B.~Schleicher, N.~Albert, K.~Nielsch
\paper Air-oxidation of Nb Nano-Films
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2018
\vol 52
\issue 5
\pages 529
\mathnet{http://mi.mathnet.ru/phts5855}
\elib{https://elibrary.ru/item.asp?id=32740393}
\transl
\jour Semiconductors
\yr 2018
\vol 52
\issue 5
\pages 678--682
\crossref{https://doi.org/10.1134/S1063782618050196}
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  • https://www.mathnet.ru/eng/phts/v52/i5/p529
    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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