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Fizika i Tekhnika Poluprovodnikov, 2018, Volume 52, Issue 5, Page 518 (Mi phts5844)  

This article is cited in 2 scientific papers (total in 2 papers)

XXV International Symposium ''Nanostructures: Physics and Technology'', Saint Petersburg, June 26-30, 2017
Nanostructure Technology

Fabrication of silicon nanostructures for application in photonics

A. N. Kamalievaa, N. A. Toropova, T. A. Vartanyana, M. A. Baranova, P. S. Parfenova, K. V. Bogdanova, Yu. A. Zharovaab, V. A. Tolmachevb

a ITMO University, 197101 St. Petersburg, Russia
b Ioffe Institute, 194021 St. Petersburg, Russia
Full-text PDF (27 kB) Citations (2)
Abstract: Silicon is the primary material of modern electronics. It also possesses bright potentials for applications in nanophotonics. At the same time optical properties of bulk silicon do not fully satisfy requirements imposed on them. Fortunately, properties of silicon nanostructures strongly depend on their shapes and sizes. In this regard, of special interest is the development of fabrication and post-processing methods of silicon nanostructures. In this contribution we propose a method for silicon nanostructures fabrication combining the technique of high-vacuum deposition with metal-assisted chemical etching. SEM images as well as ellipsometry, Raman scattering and optical spectroscopy data prove that the desired structural changes were obtained.
Funding agency Grant number
Russian Foundation for Basic Research 16-02-00932 A
17-02-01116 A
Ministry of Education and Science of the Russian Federation 074-U01
MK-228.2017.2
3.4903.2017/6.7
Authors thank the next foundations for financial support: the RFBR (16-02-00932 A, and 17-02-01116 A), the Government of Russia (074-U01), Presidential Grant (MK-228.2017.2), and Ministry of education and science of Russian Federation (3.4903.2017/6.7).
English version:
Semiconductors, 2018, Volume 52, Issue 5, Pages 632–635
DOI: https://doi.org/10.1134/S1063782618050135
Bibliographic databases:
Document Type: Article
Language: English
Citation: A. N. Kamalieva, N. A. Toropov, T. A. Vartanyan, M. A. Baranov, P. S. Parfenov, K. V. Bogdanov, Yu. A. Zharova, V. A. Tolmachev, “Fabrication of silicon nanostructures for application in photonics”, Fizika i Tekhnika Poluprovodnikov, 52:5 (2018), 518; Semiconductors, 52:5 (2018), 632–635
Citation in format AMSBIB
\Bibitem{KamTorVar18}
\by A.~N.~Kamalieva, N.~A.~Toropov, T.~A.~Vartanyan, M.~A.~Baranov, P.~S.~Parfenov, K.~V.~Bogdanov, Yu.~A.~Zharova, V.~A.~Tolmachev
\paper Fabrication of silicon nanostructures for application in photonics
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2018
\vol 52
\issue 5
\pages 518
\mathnet{http://mi.mathnet.ru/phts5844}
\elib{https://elibrary.ru/item.asp?id=32740382}
\transl
\jour Semiconductors
\yr 2018
\vol 52
\issue 5
\pages 632--635
\crossref{https://doi.org/10.1134/S1063782618050135}
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  • https://www.mathnet.ru/eng/phts/v52/i5/p518
  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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