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Fizika i Tekhnika Poluprovodnikov, 2018, Volume 52, Issue 8, Pages 827–835
DOI: https://doi.org/10.21883/FTP.2018.08.46205.8702
(Mi phts5748)
 

Non-electronic properties of semiconductors (atomic structure, diffusion)

Formation of precipitates in Si implanted with $^{64}$Zn$^{+}$ and $^{16}$O$^{+}$ ions

V. V. Privezentseva, E. P. Kirilenkob, A. V. Goryachevb, A. V. Lutzauc

a Insitute of Physics and Technology, Institution of Russian Academy of Sciences, Moscow
b National Research University of Electronic Technology
c Joint-Stock Company "Scientific and Production Enterprise Pulsar", Moscow
Abstract: The results of studying the surface Si layer and precipitate formation in CZ $n$-Si(100) samples sequentially implanted with $^{64}$Zn$^{+}$ ions with a dose of 5 $\times$ 10$^{16}$ cm$^2$ and energy of 100 keV and $^{16}$O$^{+}$ ions with the same dose but an energy of 33 keV at room temperature so that their projection paths $R_p$ = 70 nm would coincide are presented. The post-implantation samples are annealed for 1 h in an inert Ar medium in the temperature range of 400–900$^{\circ}$C with a step of 100$^{\circ}$C. The profiles of the implanted impurities are studied by time-of-flight secondary ion mass spectrometry. The Si surface is visualized using a scanning electron microscope, while the near-surface layer is visualized with the help of maps of elements formed by Auger electron spectroscopy with profiling over depth. The ZnO(002) texture is formed in an amorphized Si layer after the implantation of Zn and O ions. ZnO(102) crystallites of 5 nm in size are found in a recrystallized single-crystalline Si layer after annealing in Ar at 700$^{\circ}$C.
Received: 09.08.2017
Accepted: 26.10.2017
English version:
Semiconductors, 2018, Volume 52, Issue 8, Pages 961–968
DOI: https://doi.org/10.1134/S106378261808016X
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. V. Privezentsev, E. P. Kirilenko, A. V. Goryachev, A. V. Lutzau, “Formation of precipitates in Si implanted with $^{64}$Zn$^{+}$ and $^{16}$O$^{+}$ ions”, Fizika i Tekhnika Poluprovodnikov, 52:8 (2018), 827–835; Semiconductors, 52:8 (2018), 961–968
Citation in format AMSBIB
\Bibitem{PriKirGor18}
\by V.~V.~Privezentsev, E.~P.~Kirilenko, A.~V.~Goryachev, A.~V.~Lutzau
\paper Formation of precipitates in Si implanted with $^{64}$Zn$^{+}$ and $^{16}$O$^{+}$ ions
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2018
\vol 52
\issue 8
\pages 827--835
\mathnet{http://mi.mathnet.ru/phts5748}
\crossref{https://doi.org/10.21883/FTP.2018.08.46205.8702}
\elib{https://elibrary.ru/item.asp?id=35269421}
\transl
\jour Semiconductors
\yr 2018
\vol 52
\issue 8
\pages 961--968
\crossref{https://doi.org/10.1134/S106378261808016X}
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