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Fizika i Tekhnika Poluprovodnikov, 2018, Volume 52, Issue 9, Pages 1104–1106
DOI: https://doi.org/10.21883/FTP.2018.09.46283.8845
(Mi phts5746)
 

This article is cited in 2 scientific papers (total in 2 papers)

Manufacturing, processing, testing of materials and structures

Raman spectra of thick epitaxial GaN layers formed on SiC by the sublimation sandwich method

A. N. Anisimova, A. A. Vol'fsona, E. N. Mokhovb

a Ioffe Institute, St. Petersburg
b St. Petersburg National Research University of Information Technologies, Mechanics and Optics
Full-text PDF (98 kB) Citations (2)
Abstract: The Raman spectra of thick ($\sim$100 $\mu$m and more) GaN layers grown on crystalline SiC substrates by the sublimation sandwich method are studied. Good agreement between the spectra of the SiC substrates used in the study and published data indicates that the measurements made in the study are reliable. The minimum difference between the results of the measurements and published evidence for GaN layers means that the layers grown by the sublimation sandwich method in the study compare well with those fabricated by the metalorganic vapor phase epitaxy (MOVPE) or chloride-hydride vapor phase epitaxy (CHVPE) techniques.
Keywords: Sublimation Sandwich Method (SSM), Raman Spectra, Chloride Hydride Vapor Phase Epitaxy (CHVPE), Metalorganic Vapor Phase Epitaxy (MOVPE), Gallium Nitride.
Received: 15.02.2018
Accepted: 22.03.2018
English version:
Semiconductors, 2018, Volume 52, Issue 9, Pages 1225–1227
DOI: https://doi.org/10.1134/S1063782618090026
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. N. Anisimov, A. A. Vol'fson, E. N. Mokhov, “Raman spectra of thick epitaxial GaN layers formed on SiC by the sublimation sandwich method”, Fizika i Tekhnika Poluprovodnikov, 52:9 (2018), 1104–1106; Semiconductors, 52:9 (2018), 1225–1227
Citation in format AMSBIB
\Bibitem{AniVolMok18}
\by A.~N.~Anisimov, A.~A.~Vol'fson, E.~N.~Mokhov
\paper Raman spectra of thick epitaxial GaN layers formed on SiC by the sublimation sandwich method
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2018
\vol 52
\issue 9
\pages 1104--1106
\mathnet{http://mi.mathnet.ru/phts5746}
\crossref{https://doi.org/10.21883/FTP.2018.09.46283.8845}
\elib{https://elibrary.ru/item.asp?id=36903559}
\transl
\jour Semiconductors
\yr 2018
\vol 52
\issue 9
\pages 1225--1227
\crossref{https://doi.org/10.1134/S1063782618090026}
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  • https://www.mathnet.ru/eng/phts/v52/i9/p1104
  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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