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Fizika i Tekhnika Poluprovodnikov, 2018, Volume 52, Issue 10, Pages 1137–1144
DOI: https://doi.org/10.21883/FTP.2018.10.46453.8838
(Mi phts5707)
 

This article is cited in 1 scientific paper (total in 1 paper)

Amorphous, glassy, organic semiconductors

Effect of the temporal characteristics of modulated DC plasma with the (SiH$_{4}$–Ar–O$_{2}$) gas phase on ncl-Si growth in an$a$-SiO$_{x}$:H matrix (C$_{\mathrm{O}_2}$ = 15.5 mol %)

Yu. K. Undalova, E. I. Terukovab, I. N. Trapeznikovaa

a Ioffe Institute, St. Petersburg
b Saint Petersburg Electrotechnical University "LETI"
Full-text PDF (378 kB) Citations (1)
Abstract: The effect of various operating conditions of time-modulated DC (direct current) plasma on the formation of an amorphous $a$-SiO$_{x}$:H matrix and silicon nanoclusters is studied using IR (infrared) and photoluminescence spectra. DC-plasma modulation consists in repeated ($n$ = 180) switching off and on of the magnetron magnet coil with various time combinations, $t_{\operatorname{off}}$ = 1, 2, 5, 10, 15 s and $t_{\operatorname{on}}$ = 5, 10, 15 s, respectively, at a fixed oxygen concentration (C$_{\mathrm{O}_2}$ = 15.5 mol %) in a (SiH$_{4}$ + Ar + О$_{2}$) gas mixture. The positive effect of self-induction on the formation of both the amorphous matrix and silicon nanoclusters is confirmed. The largest values of $x$ in $a$-SiO$_{x}$:H and photoluminescence intensity are observed in the case of the combination of prolonged plasma residence in the working state ($t_{\operatorname{on}}$ = 10–15 s) and the maximum magnetic-field strength. The effect of $t_{\operatorname{off}}$ on the processes of the formation of both the $a$-SiO$_{x}$:H matrix and silicon nanoclusters is also noted.
Keywords: Silicon Nanoclusters, Magnetic Coil, Self-induction Effect, Nanoparticle Plasma, Time Toff.
Received: 07.02.2018
Accepted: 26.03.2018
English version:
Semiconductors, 2018, Volume 52, Issue 10, Pages 1255–1263
DOI: https://doi.org/10.1134/S1063782618100214
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: Yu. K. Undalov, E. I. Terukov, I. N. Trapeznikova, “Effect of the temporal characteristics of modulated DC plasma with the (SiH$_{4}$–Ar–O$_{2}$) gas phase on ncl-Si growth in an$a$-SiO$_{x}$:H matrix (C$_{\mathrm{O}_2}$ = 15.5 mol %)”, Fizika i Tekhnika Poluprovodnikov, 52:10 (2018), 1137–1144; Semiconductors, 52:10 (2018), 1255–1263
Citation in format AMSBIB
\Bibitem{UndTerTra18}
\by Yu.~K.~Undalov, E.~I.~Terukov, I.~N.~Trapeznikova
\paper Effect of the temporal characteristics of modulated DC plasma with the (SiH$_{4}$--Ar--O$_{2}$) gas phase on ncl-Si growth in an$a$-SiO$_{x}$:H matrix (C$_{\mathrm{O}_2}$ = 15.5 mol \%)
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2018
\vol 52
\issue 10
\pages 1137--1144
\mathnet{http://mi.mathnet.ru/phts5707}
\crossref{https://doi.org/10.21883/FTP.2018.10.46453.8838}
\elib{https://elibrary.ru/item.asp?id=36903572}
\transl
\jour Semiconductors
\yr 2018
\vol 52
\issue 10
\pages 1255--1263
\crossref{https://doi.org/10.1134/S1063782618100214}
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  • https://www.mathnet.ru/eng/phts/v52/i10/p1137
  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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