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Fizika i Tekhnika Poluprovodnikov, 2019, Volume 53, Issue 1, Pages 137–142
DOI: https://doi.org/10.21883/FTP.2019.01.47001.8947
(Mi phts5625)
 

This article is cited in 5 scientific papers (total in 5 papers)

Manufacturing, processing, testing of materials and structures

Ellipsometric method for measuring the CdTe buffer-layer temperature in the molecular-beam epitaxy of CdHgTe

V. A. Shvetsab, I. A. Azarovab, D. V. Marina, M. V. Yakusheva, S. V. Rykhlitskiia

a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
b Novosibirsk State University
Full-text PDF (150 kB) Citations (5)
Abstract: An ellipsometric procedure developed for noncontact in situ measurement of the CdTe buffer-layer temperature is presented. The procedure is based on the temperature dependence of the energy position of CdTe critical points and is intended for determining the initial temperature of the growth surface before epitaxy of the cadmium–mercury–telluride compound. An express method for determining the position of critical points by the spectra of ellipsometric parameter $\Psi$ is proposed. A series of calibrated experiments is performed. They result in determination of the temperature dependences of the position of critical points. Estimations and the experiment show that the temperature-measurement accuracy is $\pm$ 3$^{\circ}$C.
Received: 02.07.2018
Revised: 09.07.2018
English version:
Semiconductors, 2019, Volume 53, Issue 1, Pages 132–137
DOI: https://doi.org/10.1134/S1063782619010196
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. A. Shvets, I. A. Azarov, D. V. Marin, M. V. Yakushev, S. V. Rykhlitskii, “Ellipsometric method for measuring the CdTe buffer-layer temperature in the molecular-beam epitaxy of CdHgTe”, Fizika i Tekhnika Poluprovodnikov, 53:1 (2019), 137–142; Semiconductors, 53:1 (2019), 132–137
Citation in format AMSBIB
\Bibitem{ShvAzaMar19}
\by V.~A.~Shvets, I.~A.~Azarov, D.~V.~Marin, M.~V.~Yakushev, S.~V.~Rykhlitskii
\paper Ellipsometric method for measuring the CdTe buffer-layer temperature in the molecular-beam epitaxy of CdHgTe
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2019
\vol 53
\issue 1
\pages 137--142
\mathnet{http://mi.mathnet.ru/phts5625}
\crossref{https://doi.org/10.21883/FTP.2019.01.47001.8947}
\elib{https://elibrary.ru/item.asp?id=37476691}
\transl
\jour Semiconductors
\yr 2019
\vol 53
\issue 1
\pages 132--137
\crossref{https://doi.org/10.1134/S1063782619010196}
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  • https://www.mathnet.ru/eng/phts/v53/i1/p137
  • This publication is cited in the following 5 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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