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Fizika i Tekhnika Poluprovodnikov, 2019, Volume 53, Issue 1, Pages 18–25
DOI: https://doi.org/10.21883/FTP.2019.01.46981.8826 (Mi phts5605) 		 
This article is cited in 4 scientific papers (total in 4 papers)

Surface, interfaces, thin films

Effect of plasma-chemical surface modification on the electron transport and work function in silicon crystals

R. K. Yafarov

Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences
Full-text PDF (209 kB) Citations (4)
DOI: https://doi.org/10.21883/FTP.2019.01.46981.8826
Abstract: The regularities governing the surface modification of silicon crystals during microwave-plasma microprocessing in different chemically active gaseous media are investigated. This modification is shown to be caused by the formation of built-in surface potentials, which, depending on the semiconductor electrical-conductivity type, differently affect the field-emission properties and surface electron transport in devices based on them.
Funding agency Grant number
Russian Science Foundation 16-19-10033
Received: 22.01.2018
Revised: 21.02.2018
English version:
Semiconductors, 2019, Volume 53, Issue 1, Pages 14–21
DOI: https://doi.org/10.1134/S106378261901024X
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: R. K. Yafarov, “Effect of plasma-chemical surface modification on the electron transport and work function in silicon crystals”, Fizika i Tekhnika Poluprovodnikov, 53:1 (2019), 18–25; Semiconductors, 53:1 (2019), 14–21
Citation in format AMSBIB
\Bibitem{Yaf19}
\by R.~K.~Yafarov
\paper Effect of plasma-chemical surface modification on the electron transport and work function in silicon crystals
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2019
\vol 53
\issue 1
\pages 18--25
\mathnet{http://mi.mathnet.ru/phts5605}
\crossref{https://doi.org/10.21883/FTP.2019.01.46981.8826}
\elib{https://elibrary.ru/item.asp?id=37476599}
\transl
\jour Semiconductors
\yr 2019
\vol 53
\issue 1
\pages 14--21
\crossref{https://doi.org/10.1134/S106378261901024X}
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  • https://www.mathnet.ru/eng/phts/v53/i1/p18
    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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