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Fizika i Tekhnika Poluprovodnikov, 2019, Volume 53, Issue 4, Pages 512–519
DOI: https://doi.org/10.21883/FTP.2019.04.47451.8981
(Mi phts5545)
 

This article is cited in 2 scientific papers (total in 2 papers)

Micro- and nanocrystalline, porous, composite semiconductors

The growth of InAs$_{x}$Sb$_{1-x}$ solid solutions on miscuted GaAs(001) substrates by molecular-beam epitaxy method

E. A. Emelyanov, A. V. Vasev, B. R. Semyagin, M. Yu. Yesin, I. D. Loshkarev, A. P. Vasilenko, M. A. Putyato, M. O. Petrushkov, V. V. Preobrazhenskii

Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
Abstract: The influence of substrate misorientation degree on the composition and morphology of layers during molecular-beam epitaxy of InAs$_{x}$Sb$_{1-x}$ solid solutions on the GaAs surface was studied. The GaAs wafers with orientation (001), which were miscuted in the [110] direction by 0, 1, 2 and 5$^\circ$, were used as substrates. The growth of heterostructures was performed for temperatures of 310$^\circ$C and 380$^\circ$C (lower and upper boundaries for the temperature range of structurally perfect InAs$_{x}$Sb$_{1-x}$ films formation, respectively). The influence of the arsenic molecular form (As$_2$ or As$_4$) on the composition of layers was studied. Studies of composition and structural properties were carried out using high-resolution X-ray diffractometry (HRXRD) and atomic force microscopy (AFM). It was established that in the series of misorientation from 0 to 5$^\circ$ the arsenic fraction x increases consecutively with the use of both flux of As$_2$ and flux of As$_4$ molecules. When the flux of As$_2$ molecules is used, the fraction $x$ increases insignificantly (in 1.05 times) with a rise of misorientation degree, but when using As$_4$ molecules, $x$ increases in 1.75 times. The increase of the growth temperature leads to the rise of the arsenic fraction in the solid solution. The morphology of the surface improves during increasing of misorientation degree at a low growth temperature and degrades at high temperatures.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 0306-2016-0011
0306-2018-0011
СП-749.2016.1
Russian Foundation for Basic Research 16-32-60087
18-32-00125
Received: 11.09.2018
Revised: 09.12.2018
Accepted: 13.12.2018
English version:
Semiconductors, 2019, Volume 53, Issue 4, Pages 503–510
DOI: https://doi.org/10.1134/S1063782619040092
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: E. A. Emelyanov, A. V. Vasev, B. R. Semyagin, M. Yu. Yesin, I. D. Loshkarev, A. P. Vasilenko, M. A. Putyato, M. O. Petrushkov, V. V. Preobrazhenskii, “The growth of InAs$_{x}$Sb$_{1-x}$ solid solutions on miscuted GaAs(001) substrates by molecular-beam epitaxy method”, Fizika i Tekhnika Poluprovodnikov, 53:4 (2019), 512–519; Semiconductors, 53:4 (2019), 503–510
Citation in format AMSBIB
\Bibitem{EmeVasSem19}
\by E.~A.~Emelyanov, A.~V.~Vasev, B.~R.~Semyagin, M.~Yu.~Yesin, I.~D.~Loshkarev, A.~P.~Vasilenko, M.~A.~Putyato, M.~O.~Petrushkov, V.~V.~Preobrazhenskii
\paper The growth of InAs$_{x}$Sb$_{1-x}$ solid solutions on miscuted GaAs(001) substrates by molecular-beam epitaxy method
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2019
\vol 53
\issue 4
\pages 512--519
\mathnet{http://mi.mathnet.ru/phts5545}
\crossref{https://doi.org/10.21883/FTP.2019.04.47451.8981}
\elib{https://elibrary.ru/item.asp?id=37644625}
\transl
\jour Semiconductors
\yr 2019
\vol 53
\issue 4
\pages 503--510
\crossref{https://doi.org/10.1134/S1063782619040092}
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  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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