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Surface, interfaces, thin films
Electromigration effect on vacancy islands nucleation on Si(100) surface during sublimation
S. V. Sitnikova, E. E. Rodyakinaab, A. V. Latyshevab a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
b Novosibirsk State University
Abstract:
By means of in situ ultrahigh vacuum reflection electron microscopy, the nucleation of vacancy islands on wide terraces of the Si(100) surface is investigated. The temperature dependence of the displacement of a vacancy island nucleation center is determined in the process of heating a sample with a dc electric current. On the basis of a theoretical model, the effective electric charge of addimers is estimated in the direction across dimer rows of the surface. The effective charge has a positive sign and does not exceed 15 units of the elementary charge in the temperature range of 1020–1120$^{\circ}$C.
Received: 10.12.2018 Revised: 09.01.2019 Accepted: 23.01.2019
Citation:
S. V. Sitnikov, E. E. Rodyakina, A. V. Latyshev, “Electromigration effect on vacancy islands nucleation on Si(100) surface during sublimation”, Fizika i Tekhnika Poluprovodnikov, 53:6 (2019), 805–809; Semiconductors, 53:6 (2019), 795–799
Linking options:
https://www.mathnet.ru/eng/phts5487 https://www.mathnet.ru/eng/phts/v53/i6/p805
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Statistics & downloads: |
Abstract page: | 47 | Full-text PDF : | 12 |
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