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Fizika i Tekhnika Poluprovodnikov, 2019, Volume 53, Issue 8, Pages 1052–1057
DOI: https://doi.org/10.21883/FTP.2019.08.47994.9135 (Mi phts5428) 		 
This article is cited in 1 scientific paper (total in 1 paper)

Surface, interfaces, thin films

Nanostructured ITO/SiO$_{2}$ coatings

L. K. Markov, A. S. Pavluchenko, I. P. Smirnova

Ioffe Institute, St. Petersburg
Full-text PDF (493 kB) Citations (1)
DOI: https://doi.org/10.21883/FTP.2019.08.47994.9135
Abstract: The influence of a SiO$_2$ layer deposited onto nanostructured transparent conductive films of indium and tin oxide (ITO) on their optical characteristics is investigated. For this purpose, SiO$_2$ films of various thicknesses are deposited by magnetron sputtering on samples with ITO films containing whiskers of preferentially vertical orientation and possessing steadily decreasing reflectance. It is shown that this makes it possible to attain noticeable coating antireflection under the condition of the uniform overgrowth of ITO whiskers by the SiO$_2$ layer. The influence of the SiO$_2$ layer on the optical characteristics of a dense unstructured ITO film is also investigated. The results for structured and unstructured ITO/SiO$_{2}$ coatings with identical material mass contents are compared. It is noted that due to the liability of ITO material to degradation during operation in the composition of transparent conductive contacts, the results can also be interesting for the formation of coatings more resistant to the effect of the environment.
Keywords: transparent conductive oxides, optoelectronic devices, antireflection coatings, indium and tin oxide, silicon dioxide.
Received: 10.04.2019
Revised: 15.04.2019
Accepted: 15.04.2019
English version:
Semiconductors, 2019, Volume 53, Issue 8, Pages 1033–1037
DOI: https://doi.org/10.1134/S1063782619080153
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: L. K. Markov, A. S. Pavluchenko, I. P. Smirnova, “Nanostructured ITO/SiO$_{2}$ coatings”, Fizika i Tekhnika Poluprovodnikov, 53:8 (2019), 1052–1057; Semiconductors, 53:8 (2019), 1033–1037
Citation in format AMSBIB
\Bibitem{MarPavSmi19}
\by L.~K.~Markov, A.~S.~Pavluchenko, I.~P.~Smirnova
\paper Nanostructured ITO/SiO$_{2}$ coatings
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2019
\vol 53
\issue 8
\pages 1052--1057
\mathnet{http://mi.mathnet.ru/phts5428}
\crossref{https://doi.org/10.21883/FTP.2019.08.47994.9135}
\elib{https://elibrary.ru/item.asp?id=41129830}
\transl
\jour Semiconductors
\yr 2019
\vol 53
\issue 8
\pages 1033--1037
\crossref{https://doi.org/10.1134/S1063782619080153}
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  • https://www.mathnet.ru/eng/phts/v53/i8/p1052
    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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