Abstract:
The plasma-chemical deposition of diamond-like carbon (DLC) films onto heavily boron-doped single-crystal pp-type diamond (the concentration ∼∼102020 cm−3−3) in CH44 + Ar plasma is conducted. The deposition rate is 7 nm min−1−1. The elemental composition and properties of the films are studied in detail. It is found that the films are enriched with hydrogen, possess a density of 2.4 g cm−3−3, and exhibit an ultrasmooth surface (with a roughness of 0.4 ±± 0.2 nm).
The part of the study concerned with the deposition and analysis of DLC layers was supported by the President of the Russian Federation, grant for support of young candidates of sciences no. MK-3450.2019.2. The part of the study concerned with the development of the SIMS method was supported by the Russian Foundation for Basic Research, project no. 18-02-00565.
Citation:
A. I. Okhapkin, P. A. Yunin, M. N. Drozdov, S. A. Korolev, S. A. Kraev, E. A. Arkhipova, E. V. Skorokhodov, P. A. Bushuikin, V. I. Shashkin, “Plasma-chemical deposition of diamond-like films onto the surface of heavily doped single-crystal diamond”, Fizika i Tekhnika Poluprovodnikov, 53:9 (2019), 1229–1232; Semiconductors, 53:9 (2019), 1203–1206
\Bibitem{OkhYunDro19}
\by A.~I.~Okhapkin, P.~A.~Yunin, M.~N.~Drozdov, S.~A.~Korolev, S.~A.~Kraev, E.~A.~Arkhipova, E.~V.~Skorokhodov, P.~A.~Bushuikin, V.~I.~Shashkin
\paper Plasma-chemical deposition of diamond-like films onto the surface of heavily doped single-crystal diamond
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2019
\vol 53
\issue 9
\pages 1229--1232
\mathnet{http://mi.mathnet.ru/phts5407}
\crossref{https://doi.org/10.21883/FTP.2019.09.48129.12}
\elib{https://elibrary.ru/item.asp?id=41129868}
\transl
\jour Semiconductors
\yr 2019
\vol 53
\issue 9
\pages 1203--1206
\crossref{https://doi.org/10.1134/S1063782619090136}
Linking options:
https://www.mathnet.ru/eng/phts5407
https://www.mathnet.ru/eng/phts/v53/i9/p1229
This publication is cited in the following 3 articles:
Yimin Lu, Guojun Huang, Sai Wang, Lin Xi, Chaowei Mi, Shuyun Wang, Yong Cheng, “Optical properties of diamond-like carbon films prepared by pulsed laser deposition onto 3D surface substrate”, Surface Engineering, 37:4 (2021), 414
A. I. Okhapkin, P. A. Yunin, E. A. Arkhipova, S. A. Kraev, S. A. Korolev, M. N. Drozdov, V. I. Shashkin, “Formation of ohmic contacts to a diamond-like carbon layer deposited on a dielectric diamond substrate”, Semiconductors, 54:9 (2020), 1056–1058
P. A. Yunin, A. I. Okhapkin, M. N. Drozdov, S. A. Korolev, E. A. Arkhipova, S. A. Kraev, Yu. N. Drozdov, V. I. Shashkin, D. B. Radishev, “Modification of the ratio between sp2/sp3sp2/sp3-hybridized carbon components in PECVD diamond-like films”, Semiconductors, 54:9 (2020), 1047–1050
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