|
This article is cited in 11 scientific papers (total in 11 papers)
Manufacturing, processing, testing of materials and structures
Raman scattering in AlN crystals grown by sublimation on SiC и AlN seeds
I. D. Breeva, A. N. Anisimova, A. A. Vol'fsona, O. P. Kazarovaa, E. N. Mokhovb a Ioffe Institute, St. Petersburg
b St. Petersburg National Research University of Information Technologies, Mechanics and Optics
Abstract:
The Raman-scattering technique is used to analyze the structural quality of bulk AlN crystals grown by sublimation on SiC and AlN seeds. Growth on SiC seeds is conducted with retention of the SiC seed during growth (type 1) and with total evaporation of the SiC seed (type 2). Growth on AlN seeds is conducted in tungsten containers with no graphite parts (type 3). According to the analysis of Raman spectra, the highest quality is inherent in type-3 crystals that exhibit minimal full widths at half maximum of Raman lines. The experimentally observed specific features are defined by differences in the mechanism of growth and by the content of dopant impurities in the crystals grown.
Keywords:
AlN, sublimation sandwich method, Raman scattering.
Received: 28.05.2019 Revised: 03.06.2019 Accepted: 03.06.2019
Citation:
I. D. Breev, A. N. Anisimov, A. A. Vol'fson, O. P. Kazarova, E. N. Mokhov, “Raman scattering in AlN crystals grown by sublimation on SiC и AlN seeds”, Fizika i Tekhnika Poluprovodnikov, 53:11 (2019), 1593–1596; Semiconductors, 53:11 (2019), 1558–1561
Linking options:
https://www.mathnet.ru/eng/phts5370 https://www.mathnet.ru/eng/phts/v53/i11/p1593
|
Statistics & downloads: |
Abstract page: | 44 | Full-text PDF : | 12 |
|