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Fizika i Tekhnika Poluprovodnikov, 2020, Volume 54, Issue 1, Page 89 (Mi phts5313)  

This article is cited in 2 scientific papers (total in 2 papers)

Semiconductor physics

High-performance growth of terahertz quantum cascade laser structures by solid source MBE

Tao Jiang, Changle Shen, Zhiqiang Zhan, Jia Li, Ruijiao Zou, Jia Wen Luo, Ke Yu Li, Xuemin Wang, Weidong Wu

Science and Technology on Plasma Physics Laboratory, Research Center of Laser Fusion CAEP, Mian Yang 621900, Sichuan, P.R.China
Full-text PDF (28 kB) Citations (2)
Abstract: High performance growth of terahertz quantum cascade lasers (THz QCLs) based on hybrid bound-to-continuum transition and resonant phonon extraction is presented by solid source molecular beam epitaxy. The corresponding accurate control of layer thickness and alloy composition during growth, with precise calibration of the growth rate of Ga and Al by reflection high energy electron diffractometry and high resolution XRD techniques are studied in detail. By utilizing surface plasmon ridge waveguide device structures, the THz QCLs lasing at 3.3 THz with maximum powers of 426 mW at 10 K and 213 mW at 80 K are realized in pulsed mode and the maximum lasing temperature achieves 110 K.
Keywords: terahertz, quantum cascade laser, molecular beam epitaxy, superlattice, herterostructure.
Funding agency Grant number
Laser Fusion Research Center Funds for Yong Talents RCFCZ1-2017-20
The authors acknowledge the help from Lianhe Li, University of Leeds, Leeds. The project was financially supported by Laser Fusion Research Center Funds for Yong Talents (RCFCZ1-2017-20).
Received: 09.06.2019
Revised: 11.08.2019
Accepted: 29.08.2019
English version:
Semiconductors, 2020, Volume 54, Issue 1, Pages 131–136
DOI: https://doi.org/10.1134/S1063782620010248
Bibliographic databases:
Document Type: Article
Language: English
Citation: Tao Jiang, Changle Shen, Zhiqiang Zhan, Jia Li, Ruijiao Zou, Jia Wen Luo, Ke Yu Li, Xuemin Wang, Weidong Wu, “High-performance growth of terahertz quantum cascade laser structures by solid source MBE”, Fizika i Tekhnika Poluprovodnikov, 54:1 (2020), 89; Semiconductors, 54:1 (2020), 131–136
Citation in format AMSBIB
\Bibitem{TaoSheZha20}
\by Tao~Jiang, Changle~Shen, Zhiqiang~Zhan, Jia~Li, Ruijiao~Zou, Jia~Wen~Luo, Ke~Yu~Li, Xuemin~Wang, Weidong~Wu
\paper High-performance growth of terahertz quantum cascade laser structures by solid source MBE
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2020
\vol 54
\issue 1
\pages 89
\mathnet{http://mi.mathnet.ru/phts5313}
\elib{https://elibrary.ru/item.asp?id=42571077}
\transl
\jour Semiconductors
\yr 2020
\vol 54
\issue 1
\pages 131--136
\crossref{https://doi.org/10.1134/S1063782620010248}
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  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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