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Fizika i Tekhnika Poluprovodnikov, 2020, Volume 54, Issue 3, Pages 266–274
DOI: https://doi.org/10.21883/FTP.2020.03.49031.9203
(Mi phts5263)
 

This article is cited in 2 scientific papers (total in 2 papers)

Semiconductor physics

Kelvin probe force microscopy study of the electrostatic system of the crystal surface of AuNi/GaN Schottky diodes

N. A. Torkhovabc, V. À. Novikovc

a Scientific-Research Institute of Semiconductor Devices, Tomsk
b Tomsk State University of Control Systems and Radioelectronics
c Tomsk State University
Full-text PDF (999 kB) Citations (2)
Abstract: Using atomic-force-microscopy investigations of the electrostatic system of the crystal surface of AuNi/$n$$n^+$-GaN planar Schottky diodes, it is shown that the electron work function for the surface of metal Schottky contacts depends on their linear size (diameter D). At $D>$ 120 $\mu$m, the work function of the central contact region approaches the work function $e\varphi_{\mathrm{Au}}\approx$ 5.40 eV of a continuous metallic gold film. A decrease in the diameter leads to a decrease in the work function to 5.34 eV at $D$ = 120 $\mu$m, 5.21 eV at $D$ = 40 $\mu$m, 5.18 eV at $D$ = 10 $\mu$m, and 5.14 eV at $D$ = 5 $\mu$m. The observed decrease in the work function with diameter is related to the increasing influence of the built-in periphery electrostatic field $\mathbf{E}_l$, which is determined by the area and perimeter of the Schottky contact. The fundamental differences between the thermodynamic and electrostatic systems of TiAlNiAu/$n^+$-GaN ohmic contacts, in contrast to analogous AuNi/$n$-GaN Schottky systems, are indicative of the absence of a Schottky barrier in them and the decisive role of the thermionic transport of mobile carriers.
Keywords: gallium nitride, Schottky diodes, ohmic contact, periphery electrostatic field, size effect, AFM Kelvin probe technique.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation 14.578.21.0240
This study was supported by the Program of Applied Research and Experimental Development “Study and Development of the Fabrication Technology of Microwave Monolithic Integrated Circuits Based on InAlN/GaN Heterostructures for Space Applications’ no. 14.578.21.0240 dated Sept 26, 2017, unique object identifier REMEFI 57817X240.
Received: 03.07.2019
Revised: 20.09.2019
Accepted: 21.10.2019
English version:
Semiconductors, 2020, Volume 54, Issue 3, Pages 337–344
DOI: https://doi.org/10.1134/S1063782620030185
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: N. A. Torkhov, V. À. Novikov, “Kelvin probe force microscopy study of the electrostatic system of the crystal surface of AuNi/GaN Schottky diodes”, Fizika i Tekhnika Poluprovodnikov, 54:3 (2020), 266–274; Semiconductors, 54:3 (2020), 337–344
Citation in format AMSBIB
\Bibitem{TorNov20}
\by N.~A.~Torkhov, V.~À.~Novikov
\paper Kelvin probe force microscopy study of the electrostatic system of the crystal surface of AuNi/GaN Schottky diodes
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2020
\vol 54
\issue 3
\pages 266--274
\mathnet{http://mi.mathnet.ru/phts5263}
\crossref{https://doi.org/10.21883/FTP.2020.03.49031.9203}
\elib{https://elibrary.ru/item.asp?id=42776680}
\transl
\jour Semiconductors
\yr 2020
\vol 54
\issue 3
\pages 337--344
\crossref{https://doi.org/10.1134/S1063782620030185}
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  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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