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Fizika i Tekhnika Poluprovodnikov, 2020, Volume 54, Issue 8, Pages 753–765
DOI: https://doi.org/10.21883/FTP.2020.08.49647.9402
(Mi phts5192)
 

This article is cited in 4 scientific papers (total in 4 papers)

Manufacturing, processing, testing of materials and structures

Interaction of fluorocarbon with silicon monoxide and processes of SiC nanowire formation

E. V. Astrova, V. P. Ulin, A. V. Parfeneva, A. V. Nashchekin, V. N. Nevedomskiy, M. V. Baidakova

Ioffe Institute, St. Petersburg
Abstract: A study of the processes of the thermal carbonization of silicon monoxide in the presence of nonstoichiometric carbon monofluoride demonstrated that raising the annealing temperature of mixtures of SiO and CF$_x$ powders in a quasi-closed volume to 1000$^\circ$C and higher leads to the formation of whisker-like SiC nanocrystals. It is found that, in parallel with the known crystallization of SiC nanowires as a result of the interaction of SiO vapor with carbon monoxide, the previously undescribed interaction of CO with gas-phase silicon difluoride SiF$_2$ takes part in their formation. At temperatures below 1200$^\circ$C, this reaction is dominant and makes the most pronounced contribution to the yield of SiC nanowires.
Keywords: the formation of nanowires (whiskers) of silicon carbide, silicon monoxide, fluorocarbon, gas-phase silicon difluoride.
Received: 06.04.2020
Revised: 12.04.2020
Accepted: 12.04.2020
English version:
Semiconductors, 2020, Volume 54, Issue 8, Pages 900–911
DOI: https://doi.org/10.1134/S1063782620080059
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: E. V. Astrova, V. P. Ulin, A. V. Parfeneva, A. V. Nashchekin, V. N. Nevedomskiy, M. V. Baidakova, “Interaction of fluorocarbon with silicon monoxide and processes of SiC nanowire formation”, Fizika i Tekhnika Poluprovodnikov, 54:8 (2020), 753–765; Semiconductors, 54:8 (2020), 900–911
Citation in format AMSBIB
\Bibitem{AstUliPar20}
\by E.~V.~Astrova, V.~P.~Ulin, A.~V.~Parfeneva, A.~V.~Nashchekin, V.~N.~Nevedomskiy, M.~V.~Baidakova
\paper Interaction of fluorocarbon with silicon monoxide and processes of SiC nanowire formation
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2020
\vol 54
\issue 8
\pages 753--765
\mathnet{http://mi.mathnet.ru/phts5192}
\crossref{https://doi.org/10.21883/FTP.2020.08.49647.9402}
\elib{https://elibrary.ru/item.asp?id=43800749}
\transl
\jour Semiconductors
\yr 2020
\vol 54
\issue 8
\pages 900--911
\crossref{https://doi.org/10.1134/S1063782620080059}
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  • https://www.mathnet.ru/eng/phts/v54/i8/p753
  • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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