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Fizika i Tekhnika Poluprovodnikov, 2020, Volume 54, Issue 9, Pages 833–840
DOI: https://doi.org/10.21883/FTP.2020.09.49813.9422 (Mi phts5157) 		 
Manufacturing, processing, testing of materials and structures

A study of the photoresponse in graphene produced by chemical vapor deposition

A. V. Babicheva, S. A. Kadinskayaa, K. Yu. Shubinaa, A. A. Vasil'eva, A. A. Blokhinbc, È. I. Moiseevd, S. A. Blokhinc, I. S. Mukhinae, I. A. Eliseyevc, V. Yu. Davydovc, P. N. Brunkovc, N. V. Kryzhanovskayad, A. Yu. Egorove

a Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg
b Submicron Heterostructures for Microelectronics Research and Engineering Center, Russian Academy of Sciences, St. Petersburg
c Ioffe Institute, St. Petersburg
d National Research University "Higher School of Economics", St. Petersburg Branch
e St. Petersburg National Research University of Information Technologies, Mechanics and Optics
Full-text PDF (1651 kB)
DOI: https://doi.org/10.21883/FTP.2020.09.49813.9422
Abstract: The results of experiments aimed at fabricating and studying the properties of photodetector structures based on single-layer graphene produced by chemical vapor deposition are presented. The configuration of a Ta$_{2}$O$_{5}$ vertical microcavity with a resonance wavelength of about 850 nm and a lower dielectric SiO$_{2}$/Ta$_{2}$O$_{5}$ distributed Bragg reflector is taken as the base structure. The conditions for the transfer and fabrication of mesas in the graphene layer on the microcavity surface are optimized. The diagnostics by Raman spectroscopy of the structural quality of graphene after fabrication of the mesas in the graphene layer and contact pads are indicative of the single-layer structure of graphene with a low intensity of features in its spectrum, responsible for imperfection of the structure. The photocurrent is measured under local optical pumping.
Keywords: photodetectors, monolayer graphene, microcavity, mesa.
Funding agency Grant number
Russian Science Foundation 18-72-00157
The study was financially supported by the Russian Science Foundation (project no. 18-72-00157).
Received: 06.05.2020
Revised: 12.05.2020
Accepted: 12.05.2020
English version:
Semiconductors, 2020, Volume 54, Issue 9, Pages 991–998
DOI: https://doi.org/10.1134/S1063782620090031
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Babichev, S. A. Kadinskaya, K. Yu. Shubina, A. A. Vasil'ev, A. A. Blokhin, È. I. Moiseev, S. A. Blokhin, I. S. Mukhin, I. A. Eliseyev, V. Yu. Davydov, P. N. Brunkov, N. V. Kryzhanovskaya, A. Yu. Egorov, “A study of the photoresponse in graphene produced by chemical vapor deposition”, Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 833–840; Semiconductors, 54:9 (2020), 991–998
Citation in format AMSBIB
\Bibitem{BabKadShu20}
\by A.~V.~Babichev, S.~A.~Kadinskaya, K.~Yu.~Shubina, A.~A.~Vasil'ev, A.~A.~Blokhin, \`E.~I.~Moiseev, S.~A.~Blokhin, I.~S.~Mukhin, I.~A.~Eliseyev, V.~Yu.~Davydov, P.~N.~Brunkov, N.~V.~Kryzhanovskaya, A.~Yu.~Egorov
\paper A study of the photoresponse in graphene produced by chemical vapor deposition
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2020
\vol 54
\issue 9
\pages 833--840
\mathnet{http://mi.mathnet.ru/phts5157}
\crossref{https://doi.org/10.21883/FTP.2020.09.49813.9422}
\elib{https://elibrary.ru/item.asp?id=44154185}
\transl
\jour Semiconductors
\yr 2020
\vol 54
\issue 9
\pages 991--998
\crossref{https://doi.org/10.1134/S1063782620090031}
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