Abstract:
Investigation of IR light emitting diodes (wavelength 850 nm) based on heterostructures AlGaAs/GaAs with multiple quantum wells InGaAs in the region generating radiation, grown by the MOCVD technique, has been carried out. Post-growth technologies for removing the growth substrate GaAs and for transfer the heterostructure on an alien carrier with an optical reflector have been developed. Technological regimes for fabricating the reflector has been optimized and the increase of the IR radiation reflection coefficient up to 92–93% has been achieved. Light-emitting diodes with the external quantum efficiency of 28.5% have been fabricated.
A.М. Nadtochiy thanks for the support in investigations by the photoluminescence method the Program of fundamental investigations of National Research University Higher School of Economics in 2021.
Citation:
A. V. Malevskaya, N. A. Kalyuzhnyy, D. A. Malevskii, S. A. Mintairov, A. M. Nadtochiy, M. V. Nakhimovich, F. Yu. Soldatenkov, M. Z. Shvarts, V. M. Andreev, “Infrared (850 nm) light-emitting diodes with multiple InGaAs quantum wells and “back” reflector”, Fizika i Tekhnika Poluprovodnikov, 55:8 (2021), 699–703; Semiconductors, 55:8 (2021), 686–690
Zhiwei Yang, Asim Abas, Yuanxun Cao, “Research of ultra-low concentration ion implantation on chip substrates using film delamination method combined with semiconductor simulation technology”, Innov. Emerg. Technol., 12 (2025)
R. A. Salii, A. V. Malevskaya, D. A. Malevskii, S. A. Mintairov, A. M. Nadtochiy, N. A. Kalyuzhnyy, “Light-emitting AlGaAs/GaAs diodes based on ingaas strain-compensated quantum wells with minimized internal losses OF 940 nm radiation absorption”, Kristallografiâ, 69:4 (2024), 743
R. A. Salii, A. V. Malevskaya, D. A. Malevskii, S. A. Mintairov, A. M. Nadtochiy, N. A. Kalyuzhnyy, “Light-Emitting AlGaAs/GaAs Diodes Based on InGaAs Strain-Compensated Quantum Wells with Minimized Internal Losses Caused by 940-nm Radiation Absorption”, Crystallogr. Rep., 69:4 (2024), 620
A. V. Malevskaya, N. A. Kalyuzhnyy, F. Y. Soldatenkov, R. V. Levin, R. A. Salii, D. A. Malevskii, P. V. Pokrovskii, V. R. Larionov, V. M. Andreev, “Investigation of Power IR (850 nm) Light-Emitting Diodes Manufacturing by Lift-Off Technique of AlGaAs–GaAs-Heterostructure to Carrier-Substrate”, Tech. Phys., 68:12 (2023), 663
A. V. Malevskaya, N. A. Kalyuzhnyy, S. A. Mintairov, R. A. Salii, D. A. Malevskii, M. V. Nakhimovich, V. R. Larionov, P. V. Pokrovskii, M. Z. Shvarts, V. M. Andreev, “High Efficiency (EQE = 37.5”, Semiconductors, 57:5 (2023), 252