Morphology and phase composition of silicon-doped titanium carbon coatings

The morphological features and phase composition of carbon coatings doped with silicon and titanium are considered. It is shown that silicon doping of carbon-titanium coatings leads to a decrease in the content of sp$^2$-hybridized clusters, free graphite atoms due to the formation of Si-C bonds, an increase in roughness, and some improvement in the hydrophobic properties of the surface.