Influence of carbide-forming metals nature on the phase composition and structure of alloyed carbon coatings

Structural-phase features of carbon coatings deposited from impulse cathode plasma doped with titanium and chromium are determined. It is established that metal-containing formations with an average size of $40..90$ nm are formed in the volume of an amorphous carbon matrix during electric arc evaporation of metals. The introduction of chromium into the carbon matrix leads to an increase in the content of carbon atoms in the $\mathrm{sp}^3$ state, doping the same carbon coating with titanium helps reduce the number of atoms with $\mathrm{sp}^3$ hybridization, increase in the size and ordering of $\mathrm{Csp}^2$ clusters.