Influence of metal concentration on the phase composition, structure and properties of carbon-metal coating

The morphological features, phase composition, microhardness and tribological properties of composite carbon coatings formed by co-precipitation of carbon plasma streams of pulsed cathodic arc discharge and flows of atoms of the metal ions (Cr, Ti, Cu) generated by magnetron sputtering, and their dependence on the power source sputtering are determined. It is shown that such layers are characterized by high density and order of $\mathrm{sp}^2$-clusters and low roughness. The hardness increases and the wear rate of counterbody decreases with increasing the power of magnetron.