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Problemy Fiziki, Matematiki i Tekhniki (Problems of Physics, Mathematics and Technics), 2014, Issue 1(18), Pages 21–25 (Mi pfmt283)  

PHYSICS

Influence of thickness on structural properties of annealed In2S3 thin films deposited by thermal evaporation

H. Izadneshana, V. F. Gremenokb

a Islamic Azad University of Marvdasht, Marvdasht, Iran
b Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus, Minsk, Belarus
References:
Abstract: In2S3 thin films of various thicknesses were deposited onto glass substrates by thermal evaporation technique. Thicknesses of In2S3 films were defined by controlling the deposition parameters and were 1200 nm, 470 nm and 50 nm. All prepared thin films were annealed at 400C for 60 min. The structural properties and morphology have been studied by X-ray diffraction, Raman spectroscopy and Atomic force microscopy. X-ray diffraction results of In2S3 thin films with thicknesses of 1200 nm and 470 nm demonstrated peaks revealed in tetragonal structure. Raman spectroscopy shows that the intensity of peaks is affected by the film thickness. The average roughness (Ra) and the root mean square roughness (RRMS) increases with thickness. This is associated with the increase of grain size in the In2S3 films.
Keywords: In2S3 thin films, thermal evaporation, structural and morphological properties, grain size.
Received: 17.02.2014
Document Type: Article
UDC: 538.911
Language: English
Citation: H. Izadneshan, V. F. Gremenok, “Influence of thickness on structural properties of annealed In2S3 thin films deposited by thermal evaporation”, PFMT, 2014, no. 1(18), 21–25
Citation in format AMSBIB
\Bibitem{IzaGre14}
\by H.~Izadneshan, V.~F.~Gremenok
\paper Influence of thickness on structural properties of annealed $\mathrm{In_2S_3}$ thin films deposited by thermal evaporation
\jour PFMT
\yr 2014
\issue 1(18)
\pages 21--25
\mathnet{http://mi.mathnet.ru/pfmt283}
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    Проблемы физики, математики и техники
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