Morphology and optical properties of multilayer refractory oxide coatings

The morphological features of the formation and optical properties of multilayer coatings based on refractory oxides of $\mathrm{SiO_2}$, $\mathrm{ZrO_2}$, $\mathrm{TiO_2}$, formed by electron beam evaporation, are established. The polarization spectra of the formed coatings and dependence of these spectra on the nature of the substrate material were analyzed. It is shown that the ratio of the transmittance coefficients of $p$-polarized and $s$-polarized radiation in the visible spectral region is maximal when the coating is deposited on the surface made of glass K-8C (in comparison with the substrates made of quartz and polymethylmethacrylate). The morphology of the coatings is characterized by low values of roughness of 1.6…4.1 nm, that determines the prospects of their application as polarization elements.