Abstract:
Optical properties of amorphous nonstoichiometric tantalum-oxide films of variable composition (TaO$_{x}$, $x$ = 1.94–2.51) in the spectral range of 1.12–4.96 eV, obtained by ion-beam sputtering-deposition of metallic tantalum at different partial oxygen pressures (0.53–9.09 $\times$ 10$^{-3}$ Pa), have been investigated. It is shown by spectral ellipsometry that the character of dispersion of the absorption coefficient and refractive index in TaO$_x$ of variable composition suggests that light-absorbing films with dispersion similar to that in metals are formed at oxygen pressures in the growth chamber below 2.21 $\times$ 10$^{-3}$ Pa, whereas transparent films with dielectric dispersion are formed at pressures above 2.81 $\times$ 10$^{-3}$ Pa. According to the data of quantumchemical simulation, the absorption peak at a photon energy of 4.6 eV in TaO$_{x}$ observed in the absorptioncoefficient dispersion spectrum is due to oxygen vacancy. The peak in the Raman-scattering spectra of TaO$_{x}$ films with metallic dispersion at frequencies of 200–230 cm$^{-1}$ is presumably related to tantalum nanoclusters.
Citation:
V. N. Kruchinin, V. A. Volodin, T. V. Perevalov, A. K. Gerasimova, V. Sh. Aliev, V. A. Gritsenko, “Optical properties of nonstoichiometric tantalum oxide TaO$_{x}$ ($x<$ 5/2) according to spectral-ellipsometry and Raman-scattering data”, Optics and Spectroscopy, 124:6 (2018), 777–782; Optics and Spectroscopy, 124:6 (2018), 808–813
\Bibitem{KruVolPer18}
\by V.~N.~Kruchinin, V.~A.~Volodin, T.~V.~Perevalov, A.~K.~Gerasimova, V.~Sh.~Aliev, V.~A.~Gritsenko
\paper Optical properties of nonstoichiometric tantalum oxide TaO$_{x}$ ($x<$ 5/2) according to spectral-ellipsometry and Raman-scattering data
\jour Optics and Spectroscopy
\yr 2018
\vol 124
\issue 6
\pages 777--782
\mathnet{http://mi.mathnet.ru/os980}
\crossref{https://doi.org/10.21883/OS.2018.06.46080.39-18}
\elib{https://elibrary.ru/item.asp?id=34982883}
\transl
\jour Optics and Spectroscopy
\yr 2018
\vol 124
\issue 6
\pages 808--813
\crossref{https://doi.org/10.1134/S0030400X18060140}
Linking options:
https://www.mathnet.ru/eng/os980
https://www.mathnet.ru/eng/os/v124/i6/p777
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