Simulation of the phase shifts of light in the orders of the diffraction gratings of the interference sensor of linear displacements

Phase shifts of light in the orders of diffraction gratings for the interference sensor of linear displacements are considered. The use of a phase diffraction grating with given geometrical parameters of the surface relief makes it possible to stabilize the phase relationships in the optical signals and, as a result, in the final signals taken from the displacement sensor. Based on mathematical modeling data, technically feasible parameters of the surface relief of diffraction gratings are proposed to create the required phase shifts between the diffracted beams and quadrature modulation signals and to achieve the required measurement accuracy with nanometric resolution.